Design, fabrication, and testing of a bistable electromagnetically actuated microvalve

• Published in: Journal of microelectromechanical systems Vol. 9; no. 2; pp. 181 - 189
• Main Authors: Capanu, M., Boyd, J.G., Hesketh, P.J.
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01.06.2000; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Beams; Beams (structural); Damping; Design engineering; Elasticity; Exact sciences and technology; Fabrication; Ferrous alloys; Flow control; Flow rate; Foils (structural shapes); Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Intermetallic compounds; Iron alloys; Magnetoelasticity; Mechanical instruments, equipment and techniques; Metal foil; Micromechanical devices and systems; Microvalves; Nickel alloys; Nickel base alloys; Photolithography; Physics; Pressure control; Process design; Silicon; Testing; Valves; Valves (mechanical); Water flow; Coils; Energy consumption; Precision engineering; Elasticity; Control synthesis; Magnetic force; Reservoir; Valves; Water flow; Manufacturing processes; Squeeze film; Flow control; Electrodeposition; Vibration control; Silicon; Photolithography; Testing; Energy flow; Electromagnetism; Balancing; System design; Bistable; Experimental study; Time response; Beam(mechanics); Bistability; Vibration damping; Response time; Miniaturization; Orifice flow
• ISSN: 1057-7157; 1941-0158
• DOI: 10.1109/84.846698

A bistable electromagnetically actuated microvalve was designed, processed, and tested. The valve was designed to control a water flow of 0.05-0.5 /spl mu/s from a reservoir at a pressure of 1-2000 Pa. The two valve components were fabricated in silicon, the upper piece comprises an electroplated gold coil, and the lower piece is an Ni/Fe alloy beam. The bistable capability was achieved by balancing the elastic forces on the beam with the magnetic forces due to a 46-/spl mu/m-thick rolled magnetic foil. The design includes the flow through the orifice, squeeze film damping due to beam motion, beam elasticity, and electromagnetics. The microvalve was tested for power consumption, flow rate, time response, Ni/Fe alloy composition, and magnetic foil properties. The valve operates at 1-2 V in both air and water.