Micropower thermoelectric generator from thin Si membranes

• Published in: Nano energy Vol. 4; pp. 73 - 80
• Main Authors: Perez-Marín, A.P., Lopeandía, A.F., Abad, Ll, Ferrando-Villaba, P., Garcia, G., Lopez, A.M., Muñoz-Pascual, F.X., Rodríguez-Viejo, J.
• Format: Journal Article Publication
• Language: English
• Published: Amsterdam Elsevier Ltd 01.03.2014; Elsevier
• Subjects: Applied sciences; CMOS; Direct energy conversion and energy accumulation; Electrical engineering. Electrical power engineering; Electrical power engineering; Electrotècnia; Energies; Energy; Energy. Thermal use of fuels; Equipments for energy generation and conversion: thermal, electrical, mechanical energy, etc; Exact sciences and technology; High voltage or high current generators; Insulators; Low-dimensional Si; Membranes (Technology); Metal oxide semiconductors, Complementary; Microelectrònica; Miscellaneous: thermoionic and thermoelectric converters, plasma guns, torches, etc; Planar thermoelectric generator; Power output; Propietats elèctriques; Si membrane; Silici; Termoenergètica; Thermoelectric; Thermogenerator; Thermoionic conversion; Various equipment and components; Àrees temàtiques de la UPC; Low-dimensional Si; Power output; Si membrane; Planar thermoelectric generator; Electric generator; Insulator; Dielectric materials; Thermoelectric generator; Micromachine; Phosphorus addition; Standards; Complementary MOS technology; Membrane; Silicon
• ISSN: 2211-2855
• DOI: 10.1016/j.nanoen.2013.12.007

We report the development of a Si-based micro thermogenerator build from silicon-on-insulator by using standard CMOS processing. Ultrathin single-crystalline Si membranes, 100nm in thickness, with embedded n and p-type doped regions electrically connected in series and thermally in parallel, are active elements of the thermoelectric device that generate thermopower under various thermal gradients. This proof-of-concept device produces an output power density of 4.5µW/cm2, under a temperature difference of 5K, opening the way to envisage integration as wearable thermoelectrics for body energy scavenging. [Display omitted] •We describe the microfabrication of a planar CMOS compatible Si-based generator.•The device contains a 100nm thick Si membrane with embedded n,p doped regions.•A power output of 4.5µW/cm2 is achieved for a temperature difference of 5.5K.•The chip could be suited for body-energy scavenging to feed low-power devices.