Control of VOCs emissions by condenser pre-treatment in a semiconductor fab

• Published in: Journal of hazardous materials Vol. 120; no. 1; pp. 9 - 14
• Main Authors: Lin, Yu-Chih, Chang, Feng-Tang, Bai, Hsunling, Pei, Bau-Shei
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 11.04.2005; Elsevier
• Subjects: Adsorbent; Air Pollution - prevention & control; Applied sciences; Atmospheric pollution; DMDS; DMS; Exact sciences and technology; Models, Theoretical; Optoelectronic industry; Organic Chemicals; Pollution; Semiconductor; Semiconductors; Temperature; TFT-LCD; Volatile organic compounds; Volatilization; Volatile organic compounds; Optoelectronic industry; TFT-LCD; Semiconductor; DMDS; DMS; Adsorbent; Liquid film; Stripping; Boiling point; Solubility; Volatile organic compound; Zeolite; Water vapor; Pollutant emission; Design; Concentrators; Condenser; Air pollution; Integrated system
• ISSN: 0304-3894; 1873-3336
• DOI: 10.1016/j.jhazmat.2004.12.035

The performance of a modified design of local condensers to pre-treat a variety of volatile organic compounds (VOCs) emitted from the stripping process of a semiconductor fab was tested in this study. The reaction temperature of the condensers was controlled at around 10 °C, it is relatively higher than the traditional condenser reaction temperature. Both VOCs and water vapors were condensed and formed liquid films. This resulted in an enhancement of the VOCs removals, especially for VOCs of high boiling points or solubility. This can help to prevent the follow up zeolite concentrator from damage. The performance of the integrated system of condenser/zeolite concentrator could, therefore, remain highly efficient for a longer operation time. Its annualized cost would also be lower than installing the zeolite concentrator only.