Dynamic Compensation Method for Humidity Sensors Based on Temperature and Humidity Decoupling

Currently, integrated humidity sensors with fast-response time are widely needed. The most commonly used polyimide capacitive humidity sensor has a long response time, which is difficult to meet the need for a fast response. Most studies focusing on technology and materials have a high cost and are...

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Published inSensors (Basel, Switzerland) Vol. 22; no. 19; p. 7229
Main Authors Yang, Wenxuan, Li, Wenchang, Lu, Huaxiang, Liu, Jian, Zhang, Tianyi
Format Journal Article
LanguageEnglish
Published Basel MDPI AG 23.09.2022
MDPI
Subjects
Analysis
Boundary conditions
Complementary metal oxide semiconductors
Decoupling
Digital electronics
Dynamic characteristics
dynamic compensation
fast response
Humidity
humidity sensor
Methods
Nanowires
Process controls
Response time
Sensors
Signal processing
Silicon wafers
temperature and humidity decoupling
China
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Abstract Currently, integrated humidity sensors with fast-response time are widely needed. The most commonly used polyimide capacitive humidity sensor has a long response time, which is difficult to meet the need for a fast response. Most studies focusing on technology and materials have a high cost and are difficult to ensure compatability with the CMOS process. The dynamic compensation method can shorten the response time by only adding digital circuits or software processing. However, conventional compensation technology is not suitable for humidity sensors due to temperature coupling. This paper proposes a new dynamic compensation method for humidity sensors based on the decoupling of temperature factors by analyzing the coupling relationship between sensor dynamic characteristics and temperature. Simulations and experiments were used to verify the proposed method. The experimental results show that the proposed method reduces the humidity response time of the sensor by 85.6%. The proposed method can effectively shorten the response time of humidity sensors.
AbstractList Currently, integrated humidity sensors with fast-response time are widely needed. The most commonly used polyimide capacitive humidity sensor has a long response time, which is difficult to meet the need for a fast response. Most studies focusing on technology and materials have a high cost and are difficult to ensure compatability with the CMOS process. The dynamic compensation method can shorten the response time by only adding digital circuits or software processing. However, conventional compensation technology is not suitable for humidity sensors due to temperature coupling. This paper proposes a new dynamic compensation method for humidity sensors based on the decoupling of temperature factors by analyzing the coupling relationship between sensor dynamic characteristics and temperature. Simulations and experiments were used to verify the proposed method. The experimental results show that the proposed method reduces the humidity response time of the sensor by 85.6%. The proposed method can effectively shorten the response time of humidity sensors.
Audience Academic
Author Zhang, Tianyi
Liu, Jian
Yang, Wenxuan
Lu, Huaxiang
Li, Wenchang
AuthorAffiliation 1 Key Laboratory of Solid-State Optoelectronics Information Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
3 Semiconductor Neural Network Intelligent Perception and Computing Technology Beijing Key Laboratory, Beijing 100083, China
4 State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2 University of Chinese Academy of Sciences, Beijing 100049, China
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Snippet Currently, integrated humidity sensors with fast-response time are widely needed. The most commonly used polyimide capacitive humidity sensor has a long...
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StartPage 7229
SubjectTerms Analysis
Boundary conditions
Complementary metal oxide semiconductors
Decoupling
Digital electronics
Dynamic characteristics
dynamic compensation
fast response
Humidity
humidity sensor
Methods
Nanowires
Process controls
Response time
Sensors
Signal processing
Silicon wafers
temperature and humidity decoupling
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Title Dynamic Compensation Method for Humidity Sensors Based on Temperature and Humidity Decoupling
URI https://www.proquest.com/docview/2724310675
https://search.proquest.com/docview/2725199719
https://pubmed.ncbi.nlm.nih.gov/PMC9570529
https://doaj.org/article/11d52941e8974b9984626fb19b761fef
Volume 22
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