Application of Polyimide Porous Membrane to Photopolymer Filter

Application of a polyimide porous membrane having a three dimensional homogeneous structure to a photopolymer filter for semiconductors was examined. When polymer solution was passed through the polyimide porous membrane, there was no change in the molecular weight of the nonpolar polystyrene, but t...

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Bibliographic Details
Published inJournal of Photopolymer Science and Technology Vol. 32; no. 6; pp. 791 - 794
Main Authors Sugawara, Tsukasa, Hirano, Isao, Kobayashi, Kensuke, Kawai, Akira
Format Journal Article
LanguageEnglish
Published Hiratsuka The Society of Photopolymer Science and Technology(SPST) 31.01.2020
Japan Science and Technology Agency
Subjects
Filtration
Homogeneous structure
Membranes
Molecular weight
Photopolymer
Photopolymers
Polyimide
Polystyrene resins
Porous membrane
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Summary:Application of a polyimide porous membrane having a three dimensional homogeneous structure to a photopolymer filter for semiconductors was examined. When polymer solution was passed through the polyimide porous membrane, there was no change in the molecular weight of the nonpolar polystyrene, but the high molecular weight molecules of the polar ArF model photopolymer T001 were selectively removed. Smaller pores and greater specific surface area in the polyimide porous membrane improve the adsorption efficiency, and the high molecular weight polar polymer removal property was promoted. Filtering photopolymers with the polyimide porous membrane suppressed the increase in defects that occurs with aging.
ISSN:0914-9244
1349-6336
DOI:10.2494/photopolymer.32.791