Materials processing with superposed Bessel beams
Superpositions of Bessel beams can be generated with >50% efficiency using an SLM and an axicon.These beams have orders-of-magnitude increase in depth-of-focus compared to Gaussian beams.Multiple craters can be fabricated on glass with single-shot exposure.The 1+(1) superposition can reduce...
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Published in | Applied surface science Vol. 360; no. PB; pp. 833 - 839 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Netherlands
Elsevier B.V
01.01.2016
Elsevier |
Subjects | |
Online Access | Get full text |
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Summary: | Superpositions of Bessel beams can be generated with >50% efficiency using an SLM and an axicon.These beams have orders-of-magnitude increase in depth-of-focus compared to Gaussian beams.Multiple craters can be fabricated on glass with single-shot exposure.The 1+(1) superposition can reduce collateral damage caused by the rings in the zero-order Bessel beams.
We report experimental results of femtosecond laser processing on the surface of glass and metal thin film using superposed Bessel beams. These beams are generated by a combination of a spatial light modulator (SLM) and an axicon with >50% efficiency, and they possess the long depth-of-focus (propagation-invariant) property as found in ordinary Bessel beams. Through micromachining experiments using femtosecond laser pulses, we show that multiple craters can be fabricated on glass with single-shot exposure, and the 1+(1) superposed beam can reduce collateral damage caused by the rings in zero-order Bessel beams in the scribing of metal thin film. |
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Bibliography: | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 USDOE Office of Science (SC), Basic Energy Sciences (BES) FG02-86ER13491 |
ISSN: | 0169-4332 1873-5584 |
DOI: | 10.1016/j.apsusc.2015.11.074 |