Materials processing with superposed Bessel beams

• Published in: Applied surface science Vol. 360; no. PB; pp. 833 - 839
• Main Authors: Yu, Xiaoming, Trallero-Herrero, Carlos A., Lei, Shuting
• Format: Journal Article
• Language: English
• Published: Netherlands Elsevier B.V 01.01.2016; Elsevier
• Subjects: Beam-shaping; Beams (radiation); Femtosecond; Femtosecond laser; Glass; Laser beams; Laser processing; Materials processing; Micromachining; Spatial light modulators; Spatial lightmodulator; Thin film solar cell; Thin films; Femtosecond laser; Thin film solar cell; Beam-shaping; Materials processing; Glass; Spatial lightmodulator
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/j.apsusc.2015.11.074

⿢Superpositions of Bessel beams can be generated with >50% efficiency using an SLM and an axicon.⿢These beams have orders-of-magnitude increase in depth-of-focus compared to Gaussian beams.⿢Multiple craters can be fabricated on glass with single-shot exposure.⿢The 1+(⿿1) superposition can reduce collateral damage caused by the rings in the zero-order Bessel beams. We report experimental results of femtosecond laser processing on the surface of glass and metal thin film using superposed Bessel beams. These beams are generated by a combination of a spatial light modulator (SLM) and an axicon with >50% efficiency, and they possess the long depth-of-focus (propagation-invariant) property as found in ordinary Bessel beams. Through micromachining experiments using femtosecond laser pulses, we show that multiple craters can be fabricated on glass with single-shot exposure, and the 1+(⿿1) superposed beam can reduce collateral damage caused by the rings in zero-order Bessel beams in the scribing of metal thin film.