Silicon CVD on powders in fluidized bed: Experimental and multifluid Eulerian modelling study
The Computational Fluid Dynamics code MFIX was used for transient simulations of silicon Fluidized Bed Chemical Vapor Deposition (FBCVD) from silane (SiH 4) on coarse alumina powders. FBCVD experiments were first performed to obtain a reference database for modelling. Experimental thermal profiles e...
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Published in | Surface & coatings technology Vol. 201; no. 22; pp. 8919 - 8923 |
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Main Authors | , , , , , |
Format | Journal Article Conference Proceeding |
Language | English |
Published |
Lausanne
Elsevier B.V
25.09.2007
Elsevier |
Subjects | |
Online Access | Get full text |
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Summary: | The Computational Fluid Dynamics code MFIX was used for transient simulations of silicon Fluidized Bed Chemical Vapor Deposition (FBCVD) from silane (SiH
4) on coarse alumina powders. FBCVD experiments were first performed to obtain a reference database for modelling. Experimental thermal profiles existing along the bed were considered in the model. 3D simulations provide better results than 2D ones and predict silane conversion rate with a mean deviation of 9% compared to experimental values. The model can predict the temporal and spatial evolutions of local void fractions, gas and particle velocities, species gas fractions and silicon deposition rate. We aim at mid term to model FBCVD treatments of submicronic powders in a vibrated reactor since we have performed experiments proving the efficacy of the process to treat submicronic particles. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 USDOE - Office of Fossil Energy (FE) DOE/NETL-IR-2007-198 Simulations presented in this paper were carried out with the help of I. Touche from LGC, using the Grid'5000 experimental testbed, an initiative from the French Ministry of Research through the ACI GRID incentive action, INRIA, CNRS and RENATER and other contributing partners (see https://www.grid5000.fr). This project has been supported by the French-ANR Réseau National Matériaux et Procédés. SP and MS acknowledge the support of U.S. DOE's Fossil Energy program None cited |
ISSN: | 0257-8972 1879-3347 |
DOI: | 10.1016/j.surfcoat.2007.04.119 |