X-ray absorption spectroscopy study on oxygen-deficient hafnium oxide film

We investigated the influence of oxygen vacancy on the electronic and atomic distributions in hafnium oxide, using hard and soft x-ray absorption spectroscopies. Analyses on the Hf L3-edge extended x-ray absorption fine structures revealed that the average Hf-O bond length reduces more than -0.1 Å i...

Full description

Saved in:
Bibliographic Details
Published inJournal of physics. Conference series Vol. 100; no. 4; p. 042044
Main Authors Cho, D-Y, Min, C-H, Kim, J-Y, Park, J-H, Oh, S-J, Hwang, C S
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.03.2008
Subjects
Absorption spectra
Conduction bands
Dichroism
Ferromagnetism
Hafnium oxide
Lattice vacancies
Oxide coatings
Oxygen
Physics
Soft x rays
X ray absorption
X-ray spectroscopy
Online AccessGet full text

Cover

More Information
Summary:We investigated the influence of oxygen vacancy on the electronic and atomic distributions in hafnium oxide, using hard and soft x-ray absorption spectroscopies. Analyses on the Hf L3-edge extended x-ray absorption fine structures revealed that the average Hf-O bond length reduces more than -0.1 Å in the presence of oxygen vacancy, consequently on the lattice relaxation. Furthermore, the O K-edge absorption spectrum shows additional band tail state beneath the genuine Hf 5d conduction band, which manifests a small occupation in Hf d shell in the oxygen-deficient oxide. However, the nonzero d occupation is found not to involve a ferromagnetic spin correlation by the absence of features in the Hf N3-edge magnetic circular dichroism.
ISSN:1742-6596
1742-6588
1742-6596
DOI:10.1088/1742-6596/100/4/042044