Characterization of MEMS resonators via feedthrough de-embedding of harmonic and subharmonic pulsed-mode response

In this paper, we model and give experimental evidence of the efficiency of pulsed-mode actuation for the characterization of capacitive MEMS resonators. In particular, we show how to process the pulsed-mode response in two modes (harmonic and subharmonic) so as to eliminate parasitic feedthrough ef...

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Bibliographic Details
Published inSensors and actuators. A. Physical. Vol. 229; pp. 211 - 217
Main Authors Brenes, A., Juillard, J., Vinci Dos Santos, F., Bonnoit, A.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 15.06.2015
Elsevier
Subjects
Actuators
Analyzers
Avionics
Capacitive feedthrough
Electrostatics
Engineering Sciences
Harmonics
MEMS characterization
Micro and nanotechnologies
Microelectronics
Open-loop actuation
Pressure sensors
Pulsed-mode response
Resonators
Signal and Image processing
State of the art
Time domain signal processing
Open-loop actuation
Time domain signal processing
MEMS characterization
Pulsed-mode response
Capacitive feedthrough
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Summary:In this paper, we model and give experimental evidence of the efficiency of pulsed-mode actuation for the characterization of capacitive MEMS resonators. In particular, we show how to process the pulsed-mode response in two modes (harmonic and subharmonic) so as to eliminate parasitic feedthrough effects and characterize the resonator more accurately. We test our approach on a pressure sensor, developed by THALES Avionics, used for avionics applications. In contrast to the existing state-of-the-art techniques, the methods described in this paper can be used to characterize electrostatic MEMS without the use of a spectrum analyzer or high-performance ADC.
Bibliography:ObjectType-Article-1
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ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2015.02.032