Design and fabrication of artificial lateral line flow sensors

• Published in: Journal of micromechanics and microengineering Vol. 12; no. 5; pp. 655 - 661
• Main Authors: Fan, Zhifang, Chen, Jack, Zou, Jun, Bullen, David, Liu, Chang, Delcomyn, Fred
• Format: Journal Article
• Language: English
• Published: Bristol IOP Publishing 01.09.2002; Institute of Physics
• Subjects: Anemometers; Exact sciences and technology; Flow of water; Fluid dynamics; Fundamental areas of phenomenology (including applications); General equipment and techniques; Instrumentation for fluid dynamics; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical instruments, equipment and techniques; Micromachining; Micromechanical devices and systems; Physics; Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing; Underwater equipment; Military application; Measurement sensor; Flow pattern; Modelling; Velocity measurement; Microsensors; Submarine vehicle; Robotics; Production process
• ISSN: 0960-1317; 1361-6439
• DOI: 10.1088/0960-1317/12/5/322

Underwater flow sensing is important for many robotics and military applications, including underwater robots and vessels. We report the development of micromachined, distributed flow sensors based on a biological inspiration, the fish lateral line sensors. Design and fabrication processes for realizing individual lateral line sensor nodes are discussed in this paper, along with preliminary characterization results.