A high efficiency silicon nitride waveguide grating coupler with a multilayer bottom reflector

We propose a high efficiency apodized grating coupler with a bottom reflector for silicon nitride photonic integrated circuits. The reflector consists of a stack of alternate silicon nitride and silicon dioxide quarter-wave films. The design, fabrication and optical characterization of the couplers...

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Bibliographic Details
Published inScientific reports Vol. 9; no. 1; pp. 12988 - 8
Main Authors Hong, Jianxun, Spring, Andrew M., Qiu, Feng, Yokoyama, Shiyoshi
Format Journal Article
LanguageEnglish
Published London Nature Publishing Group UK 10.09.2019
Nature Publishing Group
Subjects
140/125
142/126
639/624/1075/401
639/624/399/1099
639/925/927/1021
Efficiency
Etching
Humanities and Social Sciences
Integrated circuits
multidisciplinary
Science
Science (multidisciplinary)
Silicon
Silicon dioxide
Silicon nitride
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Summary:We propose a high efficiency apodized grating coupler with a bottom reflector for silicon nitride photonic integrated circuits. The reflector consists of a stack of alternate silicon nitride and silicon dioxide quarter-wave films. The design, fabrication and optical characterization of the couplers has been presented. The measured fiber to detector insertion loss was −3.5 dB which corresponds to a peak coupling efficiency of −1.75 dB. A 3 dB wavelength bandwidth of 76.34 nm was demonstrated for the grating coupler with a 20-layer reflector. The fabrication process is CMOS-compatible and requires only a single etching step.
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ISSN:2045-2322
2045-2322
DOI:10.1038/s41598-019-49324-5