Low voltage imaging and X-ray microanalysis in the SEM: challenges and opportunities

Low voltage imaging, X-ray microanalysis and X-ray mapping has become very important for the investigation of nanomaterials and their surfaces. This is especially true for low voltage imaging of non-conductive samples and beam sensitive samples. Operating the SEM at lower accelerating voltage allows...

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Bibliographic Details
Published inIOP conference series. Materials Science and Engineering Vol. 109; no. 1; pp. 12019 - 12032
Main Authors Wuhrer, R, Moran, K
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 09.02.2016
Subjects
Beams (radiation)
Electric potential
Imaging
Low voltage
Microscopes
Nanomaterials
Nanostructure
Scanning electron microscopy
Sensitivity
Spatial resolution
Voltage
X ray imagery
X-rays
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Summary:Low voltage imaging, X-ray microanalysis and X-ray mapping has become very important for the investigation of nanomaterials and their surfaces. This is especially true for low voltage imaging of non-conductive samples and beam sensitive samples. Operating the SEM at lower accelerating voltage allows for greater surface sensitivity, the ability to minimize charging effects, nanometre scale lateral X-ray spatial resolution and nanoscale X-ray depth sensitivity. Determining the correct accelerating voltage for imaging in a SEM is dependent on the instrument's operating performance at low voltage, the material being viewed, and other factors that limit effectiveness of low voltage microanalysis, which will be discussed in this paper.
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ISSN:1757-8981
1757-899X
DOI:10.1088/1757-899X/109/1/012019