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Profilometry with line-field Fourier-domain interferometry

Line-field Fourier-domain interferometry that is capable of a fast three-dimensional (3-D) shape measurement is proposed. This system is constructed from a combination of a conventional Fourier-domain interferometer and a one-dimensional imaging system. This system directs a line-shaped focus onto a...

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Bibliographic Details
Published in	Optics Express Vol. 13; no. 3; pp. 695 - 701
Main Authors	安野嘉晃, 伊藤雅英, Endo Takashi, Yasuno Yoshiaki, Makita Shuichi, Itoh Masahide, Yatagai Toyohiko
Format	Journal Article
Language	English
Published	United States Optical Society of America 07.02.2005
Online Access	Get full text
ISSN	1094-4087 1094-4087
DOI	10.1364/opex.13.000695

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Summary:	Line-field Fourier-domain interferometry that is capable of a fast three-dimensional (3-D) shape measurement is proposed. This system is constructed from a combination of a conventional Fourier-domain interferometer and a one-dimensional imaging system. This system directs a line-shaped focus onto a specimen, and a two-dimensional shape can be calculated from a single-shot image of the CCD camera without any mechanical scan. An aspherical mirror and a Japanese coin are presented as a 3-D shape measurement example.
Bibliography:	ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23
ISSN:	1094-4087 1094-4087
DOI:	10.1364/opex.13.000695