Recent developments in soft X-ray emission spectroscopy microscopy

This paper discusses the path to the commercialization of a soft-X-ray emission spectrometer system for EPMA/SEM, its application, how it can be used to investigate new materials, and offers an update on improvements being investigated to further optimise the performance. The ultimate energy resolut...

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Bibliographic Details
Published inIOP conference series. Materials Science and Engineering Vol. 891; no. 1; pp. 12022 - 12032
Main Authors Terauchi, M, Hatano, T, Koike, M, Pirozhkov, A S, Sasai, H, Nagano, T, Takakura, M, Murano, T
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.07.2020
Subjects
Calibration
Chemical equilibrium
Commercialization
Emission analysis
Energy resolution
Soft x rays
Transition metals
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Summary:This paper discusses the path to the commercialization of a soft-X-ray emission spectrometer system for EPMA/SEM, its application, how it can be used to investigate new materials, and offers an update on improvements being investigated to further optimise the performance. The ultimate energy resolution of 0.08 eV at Al L- Fermi edge is shown with current optics using a fine pixel detector. The spectral mapping technique can show chemical shift images by using an appropriate region-of-interest energy window. L-emissions of 3d transition metal elements inform one not only of the density of states of bonding but also the number of outer shell or 3d electrons. Furthermore, progress leading to improvements in the detection efficiency has resulted in more than three times increase in the B K-emission peak. Testing and evaluation of new high energy-resolution spectrometer for EPMA, and a new calibration procedure for C K-peak on graphite has resulted in improved energy calibration procedure is presented.
ISSN:1757-8981
1757-899X
DOI:10.1088/1757-899X/891/1/012022