Effects of Structural Dimension Variation on the Vibration of MEMS Ring-Based Gyroscopes

• Published in: Micromachines (Basel) Vol. 12; no. 12; p. 1483
• Main Authors: Ma, Zhipeng, Chen, Xiaoli, Jin, Xiaojun, Jin, Yiming, Zheng, Xudong, Jin, Zhonghe
• Format: Journal Article
• Language: English
• Published: Switzerland MDPI AG 29.11.2021; MDPI
• Subjects: Anisotropy; Coupling; Crystal structure; Electrodes; fabrication imperfection; Finite element analysis; frequency split; geometrical compensation; gyroscope modeling; Mathematical models; Modulus of elasticity; ring gyroscopes; Rings (mathematics); Robustness (mathematics); Single crystals; Structural design; Verticality; Vibration mode; Vibratory gyroscopes; ring gyroscopes; geometrical compensation; gyroscope modeling; frequency split; fabrication imperfection
• ISSN: 2072-666X; 2072-666X
• DOI: 10.3390/mi12121483

This study investigated the effects of structural dimension variation arising from fabrication imperfections or active structural design on the vibration characteristics of a (100) single crystal silicon (SCS) ring-based Coriolis vibratory gyroscope. A mathematical model considering the geometrical irregularities and the anisotropy of Young's modulus was developed via Lagrange's equations for simulating the dynamical behavior of an imperfect ring-based gyroscope. The dynamical analyses are focused on the effects on the frequency split between two vibration modes of interest as well as the rotation of the principal axis of the 2 mode pair, leading to modal coupling and the degradation of gyroscopic sensitivity. While both anisotropic Young's modulus and nonideal deep trench verticality affect the frequency difference between two vibration modes, they have little contribution to deflecting the principal axis of the 2 mode pair. However, the 4 variations in the width of both the ring and the supporting beams cause modal coupling to occur and the degenerate 2 mode pair to split in frequency. To aid the optimal design of MEMS ring-based gyroscopic sensors that has relatively high robustness to fabrication tolerance, a geometrical compensation based on the developed model is demonstrated to identify the geometries of the ring and the suspension.