A Novel Self-Temperature Compensation Method for Mode-Localized Accelerometers

Mode-localized sensing paradigms applied to accelerometers have recently become popular research subjects. However, the output of mode-localized accelerometers is influenced by environment temperature due to the difference in the thermal properties of the coupling resonators and the temperature depe...

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Bibliographic Details
Published inMicromachines (Basel) Vol. 13; no. 3; p. 437
Main Authors Cai, Pengcheng, Xiong, Xingyin, Wang, Kunfeng, Ma, Liangbo, Wang, Zheng, Liu, Yunfei, Zou, Xudong
Format Journal Article
LanguageEnglish
Published Switzerland MDPI AG 13.03.2022
MDPI
Subjects
2-DoF
Accelerometers
Bias
compensation
Coupling
Microelectromechanical systems
mode-localized accelerometer
Receivers & amplifiers
Resonant frequencies
Simulation
Stiffness
Temperature compensation
Temperature dependence
Thermodynamic properties
2-DoF
compensation
mode-localized accelerometer
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Summary:Mode-localized sensing paradigms applied to accelerometers have recently become popular research subjects. However, the output of mode-localized accelerometers is influenced by environment temperature due to the difference in the thermal properties of the coupling resonators and the temperature dependence of coupling stiffness. To improve the performance of mode-localized accelerometers against temperature, we proposed an in situ self-temperature compensation method by utilizing the resonant frequency besides of amplitude ratios, which can be implied online. Experimental results showed that there were nearly 79-times and 87-times improvement in zeros bias and scale factor, respectively.
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ISSN:2072-666X
2072-666X
DOI:10.3390/mi13030437