Single-Wedge Lift-Out for Atom Probe Tomography Al/Ni Multilayers Specimen Preparation Based on Dual-Beam-FIB

• Published in: Micromachines (Basel) Vol. 13; no. 1; p. 35
• Main Authors: Qiao, Yi, Zhao, Yalong, Zhang, Zheng, Liu, Binbin, Li, Fusheng, Tong, Huan, Wu, Jintong, Zhou, Zhanqi, Xu, Zongwei, Zhang, Yue
• Format: Journal Article
• Language: English
• Published: Switzerland MDPI AG 27.12.2021; MDPI
• Subjects: Al/Ni multilayers; Aluminum; atom probe tomography (APT); Composite materials; Crystal structure; Field emission microscopy; focused ion beam (FIB); Interdiffusion; Interfaces; Ion beams; Ion implantation; lift-out; Multilayers; Nickel; Phase transitions; R&D; Research & development; single-wedge; Specimen preparation; Tomography; Al/Ni multilayers; lift-out; single-wedge; atom probe tomography (APT); focused ion beam (FIB)

Atomic probe tomography (APT) samples with Al/Ni multilayer structure were successfully prepared by using a focused ion beam (FIB), combining with a field emission scanning electron microscope, with a new single-wedge lift-out method and a reduced amorphous damage layer of Ga ions implantation. The...