3-D Design and Simulation of a Piezoelectric Micropump

• Published in: Micromachines (Basel) Vol. 10; no. 4; p. 259
• Main Authors: Farshchi Yazdi, Seyed Amir Fouad, Corigliano, Alberto, Ardito, Raffaele
• Format: Journal Article
• Language: English
• Published: Switzerland MDPI AG 18.04.2019; MDPI
• Subjects: Actuation; Cooling systems; Design; Diaphragms; Dynamic response; Finite element method; finite element method (FEM); Fluid-structure interaction; fluid–structure interaction (FSI); Mechanical properties; micro electromechanical systems (MEMS); Micropumps; multiphysics simulation; Optimization; Outflow; piezoelectric material; Piezoelectricity; Silicon wafers; Valves; multiphysics simulation; finite element method (FEM); fluid–structure interaction (FSI); piezoelectric material; micro electromechanical systems (MEMS)
• ISSN: 2072-666X; 2072-666X
• DOI: 10.3390/mi10040259

The objective of this paper is to carefully study the performances of a new piezoelectric micropump that could be used, e.g., for drug delivery or micro-cooling systems. The proposed micropump is characterized by silicon diaphragms, with a piezoelectric actuation at a 60 V input voltage, and by two passive valves for flow input and output. By means of a 3-D Finite Element (FE) model, the fluid dynamic response during different stages of the working cycle is investigated, together with the fluid-structure interaction. The maximum predicted outflow is 1.62 μL min - 1 , obtained at 10 Hz working frequency. The computational model enables the optimization of geometrical features, with the goal to improve the pumping efficiency: The outflow is increased until 2.5 μL min - 1 .