3-D Design and Simulation of a Piezoelectric Micropump
The objective of this paper is to carefully study the performances of a new piezoelectric micropump that could be used, e.g., for drug delivery or micro-cooling systems. The proposed micropump is characterized by silicon diaphragms, with a piezoelectric actuation at a 60 V input voltage, and by two...
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Published in | Micromachines (Basel) Vol. 10; no. 4; p. 259 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Switzerland
MDPI AG
18.04.2019
MDPI |
Subjects | |
Online Access | Get full text |
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Summary: | The objective of this paper is to carefully study the performances of a new piezoelectric micropump that could be used, e.g., for drug delivery or micro-cooling systems. The proposed micropump is characterized by silicon diaphragms, with a piezoelectric actuation at a 60 V input voltage, and by two passive valves for flow input and output. By means of a 3-D Finite Element (FE) model, the fluid dynamic response during different stages of the working cycle is investigated, together with the fluid-structure interaction. The maximum predicted outflow is 1.62 μL min - 1 , obtained at 10 Hz working frequency. The computational model enables the optimization of geometrical features, with the goal to improve the pumping efficiency: The outflow is increased until 2.5 μL min - 1 . |
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Bibliography: | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
ISSN: | 2072-666X 2072-666X |
DOI: | 10.3390/mi10040259 |