Passive Photonic Integrated Circuits Elements Fabricated on a Silicon Nitride Platform

The fabrication processes for silicon nitride photonic integrated circuits evolved from microelectronics components technology-basic processes have common roots and can be executed using the same type of equipment. In comparison to that of electronics components, passive photonic structures require...

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Published inMaterials Vol. 15; no. 4; p. 1398
Main Authors Lelit, Marcin, Słowikowski, Mateusz, Filipiak, Maciej, Juchniewicz, Marcin, Stonio, Bartłomiej, Michalak, Bartosz, Pavłov, Krystian, Myśliwiec, Marcin, Wiśniewski, Piotr, Kaźmierczak, Andrzej, Anders, Krzysztof, Stopiński, Stanisław, Beck, Romuald B, Piramidowicz, Ryszard
Format Journal Article
LanguageEnglish
Published Switzerland MDPI AG 14.02.2022
MDPI
Subjects
arrayed waveguide grating
Design
generic technology
Indium
Integrated circuits
Manufacturing
Market positioning
Numerical analysis
Optical components
Optical properties
photonic integrated circuits
photonic sensors
Photonics
Propagation
Research centers
Silicon nitride
silicon photonics
Simulation
Supply chains
Waveguides
photonic sensors
generic technology
silicon nitride
silicon photonics
arrayed waveguide grating
photonic integrated circuits
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Summary:The fabrication processes for silicon nitride photonic integrated circuits evolved from microelectronics components technology-basic processes have common roots and can be executed using the same type of equipment. In comparison to that of electronics components, passive photonic structures require fewer manufacturing steps and fabricated elements have larger critical dimensions. In this work, we present and discuss our first results on design and development of fundamental building blocks for silicon nitride integrated photonic platform. The scope of the work covers the full design and manufacturing chain, from numerical simulations of optical elements, design, and fabrication of the test structures to optical characterization and analysis the results. In particular, technological processes were developed and evaluated for fabrication of the waveguides (WGs), multimode interferometers (MMIs), and arrayed waveguide gratings (AWGs), which confirmed the potential of the technology and correctness of the proposed approach.
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ISSN:1996-1944
1996-1944
DOI:10.3390/ma15041398