Si wire array waveguide grating with stray light reduction scheme fabricated by ArF excimer immersion lithography

• Published in: Electronics letters Vol. 49; no. 22; pp. 1401 - 1402
• Main Authors: Okayama, H, Shimura, D, Onawa, Y, Takahashi, H, Seki, M, Koshino, K, Yokoyama, N, Oshtsuka, M, Tsuchizawa, T, Nishi, H, Yamada, K, Yaegashi, H, Horikawa, T, Sasaki, H
• Format: Journal Article
• Language: English
• Published: Stevenage The Institution of Engineering and Technology 24.10.2013; Institution of Engineering and Technology; John Wiley & Sons, Inc
• Subjects: Applied sciences; ArF excimer immersion lithography; arrayed waveguide gratings; Arrays; channel spacing; Circuit properties; crosstalk; curved waveguides; Electric, optical and optoelectronic circuits; Electronics; elemental semiconductors; Exact sciences and technology; frequency 200 GHz; immersion lithography; Integrated optics. Optical fibers and wave guides; noise reduction; Optical and optoelectronic circuits; optical crosstalk; optical design techniques; optical fabrication; Photonics; silicon; slab waveguide structure; stray light; stray light reduction; transmission peak width; wire array waveguide grating; stray light; arrayed waveguide gratings; immersion lithography; channel spacing; slab waveguide structure; ArF excimer immersion lithography; transmission peak width; optical design techniques; elemental semiconductors; silicon; stray light reduction; crosstalk; curved waveguides; Si; frequency 200 GHz; noise reduction; wire array waveguide grating; optical crosstalk; optical fabrication; Waveguide array; Optical waveguide; Silicon; Manufacturing; Photolithography; Noise reduction
• ISSN: 0013-5194; 1350-911X; 1350-911X
• DOI: 10.1049/el.2013.2979

A Si wire arrayed waveguide grating designed to reduce the noise and transmission peak width and avoid systematic phase error generated at the curved waveguides is reported. A slab waveguide structure to remove stray light is used. 200 GHz spacing 16 channel devices were fabricated by ArF immersion. An improved crosstalk of −23 dB was obtained.