Dynamic characteristics of a hydraulic amplification mechanism for large displacement actuators systems

We have developed a hydraulic displacement amplification mechanism (HDAM) and studied its dynamic response when combined with a piezoelectric actuator. The HDAM consists of an incompressible fluid sealed in a microcavity by two largely deformable polydimethylsiloxane (PDMS) membranes. The geometry w...

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Published inSensors (Basel, Switzerland) Vol. 10; no. 4; pp. 2946 - 2956
Main Authors Arouette, Xavier, Matsumoto, Yasuaki, Ninomiya, Takeshi, Okayama, Yoshiyuki, Miki, Norihisa
Format Journal Article
LanguageEnglish
Published Switzerland MDPI AG 01.04.2010
Molecular Diversity Preservation International (MDPI)
Subjects
Deformation
dynamic actuation
hydraulic amplification
Hydraulics
liquid encapsulation
Membranes
MEMS
Microelectromechanical systems
Sensors
Silicon wafers
tactile display
Titanium
hydraulic amplification
MEMS
dynamic actuation
tactile display
liquid encapsulation
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Summary:We have developed a hydraulic displacement amplification mechanism (HDAM) and studied its dynamic response when combined with a piezoelectric actuator. The HDAM consists of an incompressible fluid sealed in a microcavity by two largely deformable polydimethylsiloxane (PDMS) membranes. The geometry with input and output surfaces having different cross-sectional areas creates amplification. By combining the HDAM with micro-actuators, we can amplify the input displacement generated by the actuators, which is useful for applications requiring large deformation, such as tactile displays. We achieved a mechanism offering up to 18-fold displacement amplification for static actuation and 12-fold for 55 Hz dynamic actuation.
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ISSN:1424-8220
1424-8220
DOI:10.3390/s100402946