Design and Application of Uniaxially Sensitive Stress Sensor

• Published in: Micromachines (Basel) Vol. 16; no. 1; p. 94
• Main Authors: Wu, Kaituo, Xiang, Zixun, Lu, Xinbo, Yan, Yichao, Wu, Chunyang, Wang, Tao, Zhang, Wanli
• Format: Journal Article
• Language: English
• Published: Switzerland MDPI AG 01.01.2025; MDPI
• Subjects: Boundary conditions; Directional sensitivity; Interface stability; Lead; Methods; Real time; Semiconductors; Sensors; Simulation; stress sensor; Temperature; uniaxial sensitive; Wheatstone bridge; Wheatstone bridges; uniaxial sensitive; stress sensor; Wheatstone bridge
• ISSN: 2072-666X; 2072-666X
• DOI: 10.3390/mi16010094

Current stress sensors for microsystems face integration challenges and complex signal decoding. This paper proposes a real-time uniaxially sensitive stress sensor. It is obtained by simple combinations of bar resistors using their sensitivity differences in different axes. With the aid of a Wheatstone bridge, the sensor can measure the uniaxial stress magnitude by simple calibration of the stress against the output voltage and detect the bidirectional stress magnitude and direction in a micro-zone by simple rotation. The theoretical sensitivity obtained from simulation is 0.087 mV/V·MPa when the X-bridge is stressed in the X-direction under 1 V of excitation, and the test sensitivity of the X-bridge prepared in this paper is 0.1 mV/V·MPa. The design is structurally and procedurally simple, exhibits better temperature stability, and reduces interface requirements, making it suitable for the health monitoring of multi-chip microsystem chips.