Electrospray Deposition of ZnO Thin Films and Its Application to Gas Sensors

• Published in: Micromachines (Basel) Vol. 9; no. 2; p. 66
• Main Authors: Li, Wenwang, Lin, Jinghua, Wang, Xiang, Jiang, Jiaxin, Guo, Shumin, Zheng, Gaofeng
• Format: Journal Article
• Language: English
• Published: Switzerland MDPI AG 02.02.2018; MDPI
• Subjects: Alcohol; Deposition; Electric potential; electrospray; Electrospraying; Flow velocity; gas sensor; Gas sensors; Nozzles; semiconductor; Substrates; Thin films; Zinc oxide; ZnO; gas sensor; ZnO; electrospray; semiconductor
• ISSN: 2072-666X; 2072-666X
• DOI: 10.3390/mi9020066

Electrospray is a simple and cost-effective method to fabricate micro-structured thin films. This work investigates the electrospray process of ZnO patterns. The effects of experimental parameters on jet characteristics and electrosprayed patterns are studied. The length of stable jets increases with increasing applied voltage and flow rate, and decreases with increasing nozzle-to-substrate distance, while electrospray angles exhibit an opposite trend with respect to the stable jet lengths. The diameter of electrosprayed particles decreases with increasing applied voltage, and increases with flow rate. Furthermore, an alcohol gas sensor is presented. The ZnAc is calcined into ZnO, which reveals good repeatability and stability of response in target gas. The sensing response, defined as the resistance ratio of ₀ , where ₀ and are resistance of ZnO in air and alcohol gas, increases with the concentration of alcohol vapors and electrospray deposition time.