Design and Modeling of a High-Speed AFM-Scanner

A new mechanical scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The positioning range of this scanner is 13 mum in the X- and Y-directions and 4.3 mum in the vertical direction. The lowest resonance frequency of this scanner...

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Published in	IEEE transactions on control systems technology Vol. 15; no. 5; pp. 906 - 915
Main Authors	Schitter, G., Astrom, K.J., DeMartini, B.E., Thurner, P.J., Turner, K.L., Hansma, P.K.
Format	Journal Article
Language	English
Published	New York IEEE 01.09.2007 The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects	Atomic force microscopy Bandwidth Biological control systems Calibration Control Engineering Design engineering Design parameters Electrical Engineering, Electronic Engineering, Information Engineering Elektroteknik och elektronik Engineering and Technology fast scanning Force control High speed Imaging Mathematical model Mathematical models mechatronics nanotechnology Pi control precision positioning Proportional control real time imaging Reglerteknik Resonance Resonant frequency Scanners Teknik
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Abstract	A new mechanical scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The positioning range of this scanner is 13 mum in the X- and Y-directions and 4.3 mum in the vertical direction. The lowest resonance frequency of this scanner is above 22 kHz. This paper is focused on the vertical direction of the scanner, being the crucial axis of motion with the highest precision and bandwidth requirements for gentle imaging with the AFM. A second- and a fourth-order mathematical model of the scanner are derived that allow new insights into important design parameters. Proportional-integral (Pl)-feedback control of the high-speed scanner is discussed and the performance of the new AFM is demonstrated by imaging a calibration grating and a biological sample at 8 frames/s.
AbstractList	A new mechanical scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The positioning range of this scanner is 13 mum in the X- and Y- directions and 4.3 mum in the vertical direction. The lowest resonance frequency of this scanner is above 22 kHz. This paper is focused on the vertical direction of the scanner, being the crucial axis of motion with the highest precision and bandwidth requirements for gentle imaging with the AFM. A second- and a fourth- order mathematical model of the scanner are derived that allow new insights into important design parameters. Proportional-integral (Pl)-feedback control of the high-speed scanner is discussed and the performance of the new AFM is demonstrated by imaging a calibration grating and a biological sample at 8 frames/s.
Author	Schitter, G. Hansma, P.K. Astrom, K.J. Thurner, P.J. DeMartini, B.E. Turner, K.L.
Author_xml	– sequence: 1 givenname: G. surname: Schitter fullname: Schitter, G. organization: Delft Univ. of Technol., Delft – sequence: 2 givenname: K.J. surname: Astrom fullname: Astrom, K.J. – sequence: 3 givenname: B.E. surname: DeMartini fullname: DeMartini, B.E. – sequence: 4 givenname: P.J. surname: Thurner fullname: Thurner, P.J. – sequence: 5 givenname: K.L. surname: Turner fullname: Turner, K.L. – sequence: 6 givenname: P.K. surname: Hansma fullname: Hansma, P.K.
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Snippet	A new mechanical scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The positioning...
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SubjectTerms	Atomic force microscopy Bandwidth Biological control systems Calibration Control Engineering Design engineering Design parameters Electrical Engineering, Electronic Engineering, Information Engineering Elektroteknik och elektronik Engineering and Technology fast scanning Force control High speed Imaging Mathematical model Mathematical models mechatronics nanotechnology Pi control precision positioning Proportional control real time imaging Reglerteknik Resonance Resonant frequency Scanners Teknik
Title	Design and Modeling of a High-Speed AFM-Scanner
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