The Development of the Differential MEMS Vector Hydrophone

• Published in: Sensors (Basel, Switzerland) Vol. 17; no. 6; p. 1332
• Main Authors: Zhang, Guojun, Liu, Mengran, Shen, Nixin, Wang, Xubo, Zhang, Wendong
• Format: Journal Article
• Language: English
• Published: Switzerland MDPI AG 08.06.2017; MDPI
• Subjects: Acceleration; acceleration sensitivity; Acoustic noise; Acoustics; Aging; Bridges; hydrophone; Hydrophones; MEMS; Microelectromechanical systems; Packaging; Sensitivity; Sensors; Silicon; Standing waves; acceleration sensitivity; hydrophone; MEMS; sensitivity
• ISSN: 1424-8220; 1424-8220
• DOI: 10.3390/s17061332

To solve the problem that MEMS vector hydrophones are greatly interfered with by the vibration of the platform and flow noise in applications, this paper describes a differential MEMS vector hydrophone that could simultaneously receive acoustic signals and reject acceleration signals. Theoretical and simulation analyses have been carried out. Lastly, a prototype of the differential MEMS vector hydrophone has been created and tested using a standing wave tube and a vibration platform. The results of the test show that this hydrophone has a high sensitivity, = -185 dB (@ 500 Hz, 0 dB reference 1 V/μPa), which is almost the same as the previous MEMS vector hydrophones, and has a low acceleration sensitivity, = -58 dB (0 dB reference 1 V/g), which has decreased by 17 dB compared with the previous MEMS vector hydrophone. The differential MEMS vector hydrophone basically meets the requirements of acoustic vector detection when it is rigidly fixed to a working platform, which lays the foundation for engineering applications of MEMS vector hydrophones.