Epitaxial lift-off of freestanding (011) and (111) SrRuO3 thin films using a water sacrificial layer

• Published in: Scientific reports Vol. 11; no. 1; pp. 12435 - 8
• Main Authors: Le, Phu T. P., ten Elshof, Johan E., Koster, Gertjan
• Format: Journal Article
• Language: English
• Published: London Nature Publishing Group UK 14.06.2021; Nature Publishing Group; Nature Portfolio
• Subjects: 639/301; 639/766; 639/925; Humanities and Social Sciences; multidisciplinary; Science; Science (multidisciplinary); Thin films
• ISSN: 2045-2322; 2045-2322
• DOI: 10.1038/s41598-021-91848-2

Two-dimensional freestanding thin films of single crystalline oxide perovskites are expected to have great potential in integration of new features to the current Si-based technology. Here, we showed the ability to create freestanding single crystalline (011)- and (111)-oriented SrRuO 3 thin films u...