Characterization of three-dimensional microstructures in single-crystal diamond

• Published in: Diamond and related materials Vol. 15; no. 10; pp. 1614 - 1621
• Main Authors: Olivero, P., Rubanov, S., Reichart, P., Gibson, B.C., Huntington, S.T., Rabeau, J.R., Greentree, Andrew D., Salzman, J., Moore, D., Jamieson, D.N., Prawer, S.
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 01.10.2006; Elsevier
• Subjects: Applied sciences; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Diamond crystal; Electronics; Elemental semiconductors; Elemental semiconductors and insulators; Exact sciences and technology; Infrared and raman spectra and scattering; Micro electromechanical systems (MEMS); Micro- and nanoelectromechanical devices (mems/nems); Micro-optics; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation; Optical properties characterization; Photoluminescence; Physics; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Diamond crystal; Micro electromechanical systems (MEMS); Optical properties characterization; Micro-optics; Raman spectra; Ion implantation; Digital simulation; Three-dimensional systems; Crystallization; Diamonds; Photoluminescence; Machining; Experimental study; Focused ion beam technology; Lift off; Monocrystals; Monte Carlo methods; Waveguides; Selective etching; Crystal microstructure; Damage; Microelectromechanical device
• ISSN: 0925-9635; 1879-0062
• DOI: 10.1016/j.diamond.2006.01.018

We report on the Raman and photoluminescence characterization of three-dimensional microstructures fabricated in single crystal diamond with a Focused Ion Beam (FIB) assisted lift-off technique. The fabrication method is based on MeV ion implantation, followed by FIB micropatterning and selective chemical etching. In a previous publication we reported on the fabrication of a micro-bridge structure exhibiting waveguiding behavior [ P. Olivero, S. Rubanov, P. Reichart, B. Gibson, S. Huntington, J. Rabeau, Andrew D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, S. Prawer, Adv. Mater., 17 (20) (2005) 2427]. In the present work, Raman and photoluminescence spectroscopies are employed to characterize the structural quality of such microstructures, particularly as regards the removal of residual damage created during the machining process. Three-dimensional microstructures in high quality single crystal diamond have many applications, ranging from integrated quantum-optical devices to micro-electromechanical assemblies.