Preparation of palladium–silver alloy films by a dual-sputtering technique and its application in hydrogen separation membrane

• Published in: Thin solid films Vol. 479; no. 1; pp. 89 - 94
• Main Authors: Tong, H.D., vanden Berg, A.H.J., Gardeniers, J.G.E., Jansen, H.V., Gielens, F.C., Elwenspoek, M.C.
• Format: Journal Article
• Language: English
• Published: Lausanne Elsevier B.V 23.05.2005; Elsevier Science
• Subjects: Alloys; Biological and medical sciences; Cell membranes. Ionic channels. Membrane pores; Cell structures and functions; Cross-disciplinary physics: materials science; rheology; Deposition by sputtering; Exact sciences and technology; Fundamental and applied biological sciences. Psychology; Hydrogen; Materials science; Membranes, bilayers, and vesicles; Methods of deposition of films and coatings; film growth and epitaxy; Molecular and cellular biology; Palladium; Physics; Sputtering; Palladium; Hydrogen; Sputtering; Alloys; Scanning electron microscopy; Membranes; Inorganic compounds; Crystal growth from vapors; XRD; Experimental study; Thin films; Binary alloys; Magnetrons; Cathode sputtering; Transmission electron microscopy; Palladium alloys; Chemical composition; Microstructure; Silver alloys; Transition element alloys; X-ray photoelectron spectra
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2004.11.179

Submicron thick palladium–silver alloy films with 23 wt.% of silver (Pd–Ag23) have been synthesized by simultaneous sputtering from pure targets of Pd and Ag. Full characterization of the deposited films was performed by using X-ray photoelectron spectroscopy, high-resolution scanning electron microscopy, high-resolution transmission electron microscopy, and X-ray diffraction. The analytical results revealed that the deposited Pd–Ag alloy had a Ag content of about 21–22 wt.%, very close to and within measurement error of the expected Ag content of 23 wt.%. The as-deposited Pd–Ag alloy had a fine microstructure. The characterized Pd–Ag alloy films were then deposited on a supporting microsieve to form Pd–Ag membranes for hydrogen separation. The submicron thick Pd–Ag membranes obtained high separation fluxes up to 4 mol H 2/m 2 s with a selectivity higher than 1500 for hydrogen over helium.