Direct synthesis of multi-layer graphene film on various substrates by microwave plasma at low temperature

• Published in: Thin solid films Vol. 587; pp. 8 - 13
• Main Authors: Park, Hyun Jae, Ahn, Byung Wook, Kim, Tae Yoo, Lee, Jung Woo, Jung, Yong Ho, Choi, Yong Sup, Song, Young Il, Suh, Su Jeong
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 31.07.2015
• Subjects: Direct graphene synthesis; Electrical resistivity; Electron cyclone resonance microwave plasma; Electron microscopes; Field emission; Glass; Graphene; Low temperature; Multilayers; Transmittance; Various substrates; Vertically standing multi-layer graphene; Wafers; Vertically standing multi-layer graphene; Direct graphene synthesis; Electron cyclone resonance microwave plasma; Various substrates; Low temperature
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2015.01.011

We introduce a possible route for vertically standing multi-layer graphene films (VMGs) on various substrates at low temperature by electron cyclone resonance microwave plasma. VMG films on various substrates, including copper sheet, glass and silicon oxide wafer, were analyzed by studying their structural, electrical, and optical properties. The density and temperature of plasma were measured using Cylindrical Langmuir probe analysis. The morphologies and microstructures of multi-layer graphene were characterized using field emission scattering electron microscope, high resolution transmission electron microscope, and Raman spectra measurement. The VMGs on different substrates at the same experimental conditions synthesized the wrinkled VMGs with different heights. In addition, the transmittance and electrical resistance were measured using ultra-violet visible near-infrared spectroscopy and 4 probe point surface resistance measurement. The VMGs on glass substrate obtained a transmittance of 68.8% and sheet resistance of 796Ω/square, whereas the VMGs on SiO2 wafer substrate showed good sheet resistance of 395Ω/square and 278Ω/square. The results presented herein demonstrate a simple method of synthesizing of VMGs on various substrates at low temperature for mass production, in which the VMGs can be used in a wide range of application fields for energy storage, catalysis, and field emission due to their unique orientation. •We present for synthesis method of graphene at low temperature on various substrates.•We grow the graphene films at low temperature under of 432°C.•Structural information of graphene films were studied upon Raman spectroscopy.•Inter-layer spacing of vertically standing graphene relies on synthesis time.•We measured a transmittance and a resistance for graphene films on difference substrate.