Hybrid lithography: Combining UV-exposure and two photon direct laser writing

We demonstrate a method for the combination of UV-lithography and direct laser writing using two-photon polymerization (2PP-DLW). First a dye doped photoresist is used for UV-lithography. Adding an undoped photoresist on top of the developed structures enables three-dimensional alignment of the 2PP-...

Full description

Saved in:
Bibliographic Details
Published inOptics express Vol. 21; no. 24; p. 29921
Main Authors Eschenbaum, Carsten, Großmann, Daniel, Dopf, Katja, Kettlitz, Siegfried, Bocksrocker, Tobias, Valouch, Sebastian, Lemmer, Uli
Format Journal Article
LanguageEnglish
Published United States 02.12.2013
Subjects
Equipment Design
Equipment Failure Analysis
Lenses
Materials Testing
Microfluidic Analytical Techniques - instrumentation
Molecular Imprinting - methods
Photography - methods
Photons
Polymers - chemistry
Polymers - radiation effects
Surface Properties - radiation effects
Ultraviolet Rays
Online AccessGet full text

Cover

Abstract We demonstrate a method for the combination of UV-lithography and direct laser writing using two-photon polymerization (2PP-DLW). First a dye doped photoresist is used for UV-lithography. Adding an undoped photoresist on top of the developed structures enables three-dimensional alignment of the 2PP-DLW structures by detecting the spatially varying fluorescence of the two photoresists. Using this approach we show three dimensional alignment by adding 3D structures made by 2PP-DLW to a previously UV-exposed structure. Furthermore, a fluidic system with an integrated total internal reflection mirror to observe particles in a microfluidic channel is demonstrated.
AbstractList We demonstrate a method for the combination of UV-lithography and direct laser writing using two-photon polymerization (2PP-DLW). First a dye doped photoresist is used for UV-lithography. Adding an undoped photoresist on top of the developed structures enables three-dimensional alignment of the 2PP-DLW structures by detecting the spatially varying fluorescence of the two photoresists. Using this approach we show three dimensional alignment by adding 3D structures made by 2PP-DLW to a previously UV-exposed structure. Furthermore, a fluidic system with an integrated total internal reflection mirror to observe particles in a microfluidic channel is demonstrated.We demonstrate a method for the combination of UV-lithography and direct laser writing using two-photon polymerization (2PP-DLW). First a dye doped photoresist is used for UV-lithography. Adding an undoped photoresist on top of the developed structures enables three-dimensional alignment of the 2PP-DLW structures by detecting the spatially varying fluorescence of the two photoresists. Using this approach we show three dimensional alignment by adding 3D structures made by 2PP-DLW to a previously UV-exposed structure. Furthermore, a fluidic system with an integrated total internal reflection mirror to observe particles in a microfluidic channel is demonstrated.
We demonstrate a method for the combination of UV-lithography and direct laser writing using two-photon polymerization (2PP-DLW). First a dye doped photoresist is used for UV-lithography. Adding an undoped photoresist on top of the developed structures enables three-dimensional alignment of the 2PP-DLW structures by detecting the spatially varying fluorescence of the two photoresists. Using this approach we show three dimensional alignment by adding 3D structures made by 2PP-DLW to a previously UV-exposed structure. Furthermore, a fluidic system with an integrated total internal reflection mirror to observe particles in a microfluidic channel is demonstrated.
Author Eschenbaum, Carsten
Valouch, Sebastian
Lemmer, Uli
Großmann, Daniel
Dopf, Katja
Bocksrocker, Tobias
Kettlitz, Siegfried
Author_xml – sequence: 1
  givenname: Carsten
  surname: Eschenbaum
  fullname: Eschenbaum, Carsten
– sequence: 2
  givenname: Daniel
  surname: Großmann
  fullname: Großmann, Daniel
– sequence: 3
  givenname: Katja
  surname: Dopf
  fullname: Dopf, Katja
– sequence: 4
  givenname: Siegfried
  surname: Kettlitz
  fullname: Kettlitz, Siegfried
– sequence: 5
  givenname: Tobias
  surname: Bocksrocker
  fullname: Bocksrocker, Tobias
– sequence: 6
  givenname: Sebastian
  surname: Valouch
  fullname: Valouch, Sebastian
– sequence: 7
  givenname: Uli
  surname: Lemmer
  fullname: Lemmer, Uli
BackLink https://www.ncbi.nlm.nih.gov/pubmed/24514543$$D View this record in MEDLINE/PubMed
BookMark eNpt0DtPwzAUBWALFdEHbMzIIwMptuM8zIaqQpGKulBWy3Gc1iixg-2o9N8T1IIQYrpXut-5wxmDgbFGAXCJ0RTHKb1dzacETxFhjOATMMKI0YiiPBv82odg7P0bQphmLDsDQ0ITTBMaj8DzYl84XcJah63dONFu93dwZptCG202cP0aqY_W-s4pKEwJw87CdmuDNbDUTskAa-GVgzunQ-_PwWklaq8ujnMC1g_zl9kiWq4en2b3y0jSNAkRo1laISURy0RBSKmYFHmesEpQWdAK44yQRMasLJI8rUgai1hirKhIhWJJf5mA68Pf1tn3TvnAG-2lqmthlO08x5QxnJC4j07A1ZF2RaNK3jrdCLfn3xX04OYApLPeO1X9EIz4V8N8NecE80PDPSd_uNRBBG1NcELX_4c-AVKcfWs
CitedBy_id crossref_primary_10_1364_OE_416307
crossref_primary_10_1088_1361_6528_acd0b5
crossref_primary_10_3390_mi5040839
crossref_primary_10_1039_D3NA00147D
crossref_primary_10_1038_s41378_019_0079_9
crossref_primary_10_1016_j_mee_2018_04_001
crossref_primary_10_1016_j_mee_2019_02_009
crossref_primary_10_1364_OE_390486
crossref_primary_10_1016_j_eng_2024_09_028
crossref_primary_10_1108_RPJ_07_2017_0146
crossref_primary_10_1364_OE_26_007085
crossref_primary_10_1016_j_addma_2018_07_003
crossref_primary_10_1016_j_addma_2022_103169
crossref_primary_10_1515_ntrev_2020_0073
crossref_primary_10_1038_s41378_019_0080_3
crossref_primary_10_1364_AO_54_007323
crossref_primary_10_37188_lam_2023_037
crossref_primary_10_1515_nanoph_2021_0733
crossref_primary_10_1016_j_optcom_2020_126489
Cites_doi 10.1021/ja021045y
10.1364/AO.34.001989
10.1002/cphc.200400509
10.1016/S0925-3467(01)00178-1
10.1364/OE.17.002500
10.1108/13552540010373362
10.1016/j.progpolymsci.2008.01.001
10.1002/adma.200600882
10.1088/0960-1317/13/2/302
10.1016/j.mee.2006.01.181
10.1364/OL.28.000301
10.1364/OE.19.022659
10.1016/S0924-4247(98)00249-0
10.1364/OL.22.000132
10.1039/C1LC20672A
10.1143/JJAP.44.8739
10.2961/jlmn.2008.02.0002
10.1116/1.590490
10.1016/j.physrep.2013.07.005
10.1088/0957-4484/16/1/010
ContentType Journal Article
DBID AAYXX
CITATION
CGR
CUY
CVF
ECM
EIF
NPM
7X8
DOI 10.1364/OE.21.029921
DatabaseName CrossRef
Medline
MEDLINE
MEDLINE (Ovid)
MEDLINE
MEDLINE
PubMed
MEDLINE - Academic
DatabaseTitle CrossRef
MEDLINE
Medline Complete
MEDLINE with Full Text
PubMed
MEDLINE (Ovid)
MEDLINE - Academic
DatabaseTitleList MEDLINE - Academic
MEDLINE
Database_xml – sequence: 1
  dbid: NPM
  name: PubMed
  url: https://proxy.k.utb.cz/login?url=http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed
  sourceTypes: Index Database
– sequence: 2
  dbid: EIF
  name: MEDLINE
  url: https://proxy.k.utb.cz/login?url=https://www.webofscience.com/wos/medline/basic-search
  sourceTypes: Index Database
DeliveryMethod fulltext_linktorsrc
Discipline Physics
EISSN 1094-4087
ExternalDocumentID 24514543
10_1364_OE_21_029921
Genre Research Support, Non-U.S. Gov't
Journal Article
GroupedDBID ---
123
29N
2WC
8SL
AAFWJ
AAWJZ
AAYXX
ACGFO
ADBBV
AEDJG
AENEX
AFPKN
AKGWG
ALMA_UNASSIGNED_HOLDINGS
ATHME
AYPRP
AZSQR
AZYMN
BAWUL
BCNDV
CITATION
CS3
DIK
DSZJF
DU5
E3Z
EBS
EJD
F5P
GROUPED_DOAJ
GX1
KQ8
M~E
OFLFD
OK1
OPJBK
OPLUZ
OVT
P2P
RNS
ROL
ROS
TR2
TR6
XSB
CGR
CUY
CVF
ECM
EIF
NPM
7X8
ID FETCH-LOGICAL-c465t-9476f0ec097ab22de9ca8859fa4cb4f117225c39db586f263a3c11e4a6ae955c3
ISSN 1094-4087
IngestDate Fri Jul 11 16:05:09 EDT 2025
Thu Apr 03 07:07:23 EDT 2025
Thu Apr 24 22:54:45 EDT 2025
Tue Jul 01 03:08:35 EDT 2025
IsDoiOpenAccess false
IsOpenAccess true
IsPeerReviewed true
IsScholarly true
Issue 24
Language English
License https://opg.optica.org/policies/opg-tdm-policy.json
https://doi.org/10.1364/OA_License_v1#VOR-OA
LinkModel OpenURL
MergedId FETCHMERGED-LOGICAL-c465t-9476f0ec097ab22de9ca8859fa4cb4f117225c39db586f263a3c11e4a6ae955c3
Notes ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
OpenAccessLink https://doi.org/10.1364/oe.21.029921
PMID 24514543
PQID 1499152326
PQPubID 23479
ParticipantIDs proquest_miscellaneous_1499152326
pubmed_primary_24514543
crossref_primary_10_1364_OE_21_029921
crossref_citationtrail_10_1364_OE_21_029921
ProviderPackageCode CITATION
AAYXX
PublicationCentury 2000
PublicationDate 2013-12-02
PublicationDateYYYYMMDD 2013-12-02
PublicationDate_xml – month: 12
  year: 2013
  text: 2013-12-02
  day: 02
PublicationDecade 2010
PublicationPlace United States
PublicationPlace_xml – name: United States
PublicationTitle Optics express
PublicationTitleAlternate Opt Express
PublicationYear 2013
References Jung (oe-21-24-29921-R10) 2011; 19
Maruo (oe-21-24-29921-R9) 1997; 22
Malinauskas (oe-21-24-29921-R8) 2013; 533
Kettlitz (oe-21-24-29921-R18) 2012; 12
Waits (oe-21-24-29921-R1) 2003; 13
Ehrfeld (oe-21-24-29921-R2) 1998; 16
Bertsch (oe-21-24-29921-R4) 2000; 6
Woggon (oe-21-24-29921-R12) 2009; 17
Bertsch (oe-21-24-29921-R5) 1999; 73
Serbin (oe-21-24-29921-R13) 2003; 28
Lee (oe-21-24-29921-R14) 2008; 33
Wu (oe-21-24-29921-R11) 2003; 125
Canva (oe-21-24-29921-R15) 2002; 18
Fischer (oe-21-24-29921-R16) 1995; 34
Yamada (oe-21-24-29921-R19) 2005; 44
Guo (oe-21-24-29921-R20) 2007; 19
Romanato (oe-21-24-29921-R7) 2005; 16
Neumeister (oe-21-24-29921-R3) 2008; 3
Steen (oe-21-24-29921-R6) 2006; 83
Eggeling (oe-21-24-29921-R17) 2005; 6
References_xml – volume: 125
  start-page: 554
  year: 2003
  ident: oe-21-24-29921-R11
  publication-title: J. Am. Chem. Soc.
  doi: 10.1021/ja021045y
– volume: 34
  start-page: 1989
  year: 1995
  ident: oe-21-24-29921-R16
  publication-title: Appl. Opt.
  doi: 10.1364/AO.34.001989
– volume: 6
  start-page: 791
  year: 2005
  ident: oe-21-24-29921-R17
  publication-title: ChemPhysChem
  doi: 10.1002/cphc.200400509
– volume: 18
  start-page: 391
  year: 2002
  ident: oe-21-24-29921-R15
  publication-title: Opt. Mater.
  doi: 10.1016/S0925-3467(01)00178-1
– volume: 17
  start-page: 2500
  year: 2009
  ident: oe-21-24-29921-R12
  publication-title: Opt. Express
  doi: 10.1364/OE.17.002500
– volume: 6
  start-page: 259
  year: 2000
  ident: oe-21-24-29921-R4
  publication-title: Rapid Prototyping J.
  doi: 10.1108/13552540010373362
– volume: 33
  start-page: 631
  year: 2008
  ident: oe-21-24-29921-R14
  publication-title: Prog. Polym. Sci.
  doi: 10.1016/j.progpolymsci.2008.01.001
– volume: 19
  start-page: 495
  year: 2007
  ident: oe-21-24-29921-R20
  publication-title: Adv. Mater.
  doi: 10.1002/adma.200600882
– volume: 13
  start-page: 170
  year: 2003
  ident: oe-21-24-29921-R1
  publication-title: J. Micromech. Microeng.
  doi: 10.1088/0960-1317/13/2/302
– volume: 83
  start-page: 754
  year: 2006
  ident: oe-21-24-29921-R6
  publication-title: Microelectron. Eng.
  doi: 10.1016/j.mee.2006.01.181
– volume: 28
  start-page: 301
  year: 2003
  ident: oe-21-24-29921-R13
  publication-title: Opt. Lett.
  doi: 10.1364/OL.28.000301
– volume: 19
  start-page: 22659
  year: 2011
  ident: oe-21-24-29921-R10
  publication-title: Opt. Express
  doi: 10.1364/OE.19.022659
– volume: 73
  start-page: 14
  year: 1999
  ident: oe-21-24-29921-R5
  publication-title: Sens. Actuators A
  doi: 10.1016/S0924-4247(98)00249-0
– volume: 22
  start-page: 132
  year: 1997
  ident: oe-21-24-29921-R9
  publication-title: Opt. Lett.
  doi: 10.1364/OL.22.000132
– volume: 12
  start-page: 197
  year: 2012
  ident: oe-21-24-29921-R18
  publication-title: Lab Chip
  doi: 10.1039/C1LC20672A
– volume: 44
  start-page: 8739
  year: 2005
  ident: oe-21-24-29921-R19
  publication-title: Jpn. J. Appl. Phys.
  doi: 10.1143/JJAP.44.8739
– volume: 3
  start-page: 67
  year: 2008
  ident: oe-21-24-29921-R3
  publication-title: J. Laser Micro. Nanoeng.
  doi: 10.2961/jlmn.2008.02.0002
– volume: 16
  start-page: 3526
  year: 1998
  ident: oe-21-24-29921-R2
  publication-title: J. Vac. Sci. Technol. B
  doi: 10.1116/1.590490
– volume: 533
  start-page: 1
  year: 2013
  ident: oe-21-24-29921-R8
  publication-title: Phys. Rep.
  doi: 10.1016/j.physrep.2013.07.005
– volume: 16
  start-page: 40
  year: 2005
  ident: oe-21-24-29921-R7
  publication-title: Nanotechnology
  doi: 10.1088/0957-4484/16/1/010
SSID ssj0014797
Score 2.2380357
Snippet We demonstrate a method for the combination of UV-lithography and direct laser writing using two-photon polymerization (2PP-DLW). First a dye doped photoresist...
SourceID proquest
pubmed
crossref
SourceType Aggregation Database
Index Database
Enrichment Source
StartPage 29921
SubjectTerms Equipment Design
Equipment Failure Analysis
Lenses
Materials Testing
Microfluidic Analytical Techniques - instrumentation
Molecular Imprinting - methods
Photography - methods
Photons
Polymers - chemistry
Polymers - radiation effects
Surface Properties - radiation effects
Ultraviolet Rays
Title Hybrid lithography: Combining UV-exposure and two photon direct laser writing
URI https://www.ncbi.nlm.nih.gov/pubmed/24514543
https://www.proquest.com/docview/1499152326
Volume 21
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1Lb9QwELagCIkL4t3lURkJTlFKHrYTc0PVlhXSsge6qLfIcWxKRZNoN1WBQ397x49kQ2El4BJFsR1Hni_j-WzPDEKvYFarSFbykOgoCoksRShyqsNYqiwWxhezMg7O849stiQfjunx5hC79S7pyn35849-Jf8jVXgGcjVesv8g2eGl8ADuQb5wBQnD9a9kPPth_K2MG_GJjzxtCD70VNq0D8Hyc6i-t8263yToLpqgPWlMJA03lQVgO6tVcGEiG_kpzBuqi9bGb4bmwxkNY3cDF1Z1KVxy5AMgxd3Glez9qjHb7vzwzCdedu7rg6nctNqf3zgVGz3fdfD5dhX701f1RQNzr8YrEXFqT3U4Vaqc9gSuCITUz6BevToHaA-jhIyVJeeu8Dc1njICY7-Y7icmour1ajCU7ZkVaULA3qMuztO1sNl90U10KwEGYZJbzC-nwwYTyXjm_SCgszfjrkx8aN_4V2NlCwOxlsjRPXTXUwj8zuHhPrqh6gfotj3KK9cP0dyhAo9Q8RYPmMAjTGDABAZMYIcJ7DCBLSawx8QjtDycHh3MQp80I5SE0S7kJGM6UjLimSiTpFJcijynXAv4EYmOwWBNqIRfsKQ50wlLRSrjWBHBhOIUSh6jnbqp1S7CqdRCc05A5-eEZGkpaSqiSkM7E4cxm6CgH51C-ojyJrHJt8JukzJSLKZFEhduWCfo9VC7dZFUttR72Q90AarO7F-JWjXna2CpQGYoUAA2QU-cBIY39RJ7urXkGbqzAe1ztNOtztULMCi7cs8uxOxZgFwBYAt1zA
linkProvider ISSN International Centre
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Hybrid+lithography%3A+combining+UV-exposure+and+two+photon+direct+laser+writing&rft.jtitle=Optics+express&rft.au=Eschenbaum%2C+Carsten&rft.au=Gro%C3%9Fmann%2C+Daniel&rft.au=Dopf%2C+Katja&rft.au=Kettlitz%2C+Siegfried&rft.date=2013-12-02&rft.eissn=1094-4087&rft.volume=21&rft.issue=24&rft.spage=29921&rft_id=info:doi/10.1364%2FOE.21.029921&rft_id=info%3Apmid%2F24514543&rft.externalDocID=24514543
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1094-4087&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1094-4087&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1094-4087&client=summon