Registering functional defects into periodic holographic structures

In this paper, we present two methods for registering desired defect lattices within background periodic lattices through spatial light-modulator-based holographic lithography. In the first method, the diffraction efficiency from the engineered phase pattern was used to locally modify the fill fract...

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Bibliographic Details
Published inApplied optics. Optical technology and biomedical optics Vol. 54; no. 23; p. 7007
Main Authors Lutkenhaus, Jeff, George, David, Lowell, David, Arigong, Bayaner, Zhang, Hualiang, Lin, Yuankun
Format Journal Article
LanguageEnglish
Published United States 10.08.2015
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Summary:In this paper, we present two methods for registering desired defect lattices within background periodic lattices through spatial light-modulator-based holographic lithography. In the first method, the diffraction efficiency from the engineered phase pattern was used to locally modify the fill fraction of polymerized materials in holographic structures, and, at the same time, we achieved the lattice matching between modified and background regions. In the second method, we registered spatially variant lattices for a 90 deg bend within the background periodic lattices through two steps of phase engineering of the laser beam.
ISSN:2155-3165
DOI:10.1364/AO.54.007007