Integrating 3D images using laboratory-based micro X-ray computed tomography and confocal X-ray fluorescence techniques

• Published in: X-ray spectrometry Vol. 39; no. 3; pp. 184 - 190
• Main Authors: Patterson, Brian M., Campbell, John, Havrilla, George J.
• Format: Journal Article
• Language: English
• Published: Chichester, UK John Wiley & Sons, Ltd 01.05.2010; Wiley
• Subjects: Analytical chemistry; Chemistry; Confocal; Exact sciences and technology; Fluorescence; Imaging; Mathematical models; Matlab; Rendering; Spectrometric and optical methods; Three dimensional; X-rays; High resolution; Sample; Use; Laboratory; Density; Characterization; Non destructive method; Absorption; Analysis method; Imaging; Integrated circuit; Tomography; X ray fluorescence spectrometry; Technique; Application; Resistor
• ISSN: 0049-8246; 1097-4539; 1097-4539
• DOI: 10.1002/xrs.1245

The application of non‐destructive imaging to characterizing samples has become more important as the costs of samples increase. Imaging a sample via X‐ray techniques is preferable when altering or even touching the sample affects its properties, or when the sample is fielded after characterization. Two laboratory‐based X‐ray techniques used at Los Alamos include micro X‐ray computed tomography (MXCT) and confocal micro X‐ray fluorescence (confocal MXRF). Both methods create a 3D rendering of the sample non‐destructively. MXCT produces a high‐resolution (sub‐µm voxel) rendering of the sample based upon X‐ray absorption; the resulting model is a function of density and does not contain any elemental information. Confocal MXRF produces an elementally specific 3D rendering of the sample, but at a lower (30 × 30 × 65 µm) resolution. By combining data from these two techniques, scientists provided a more comprehensive method of analysis. We will describe a MATLAB routine written to render each of these data sets individually and/or within the same coordinate system. This approach is shown in the analysis of two samples: an integrated circuit surface mounted resistor and a machined piece of polystyrene foam. The samples chosen provide an opportunity to compare and contrast the two X‐ray techniques, identify their weaknesses and show how they are used in a complementary fashion. Copyright © 2010 John Wiley & Sons, Ltd.