A wireless magnetoelastic micro-sensor array for simultaneous measurement of temperature and pressure

• Published in: IEEE transactions on magnetics Vol. 37; no. 4; pp. 2022 - 2024
• Main Authors: Jain, M.K., Grimes, C.A.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: New York, NY IEEE 01.07.2001; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Applied sciences; Arrays; Chemical sensors; Deformation; Density; Electronics; Exact sciences and technology; Magnetic fields; Magnetic flux; Magnetic resonance; Magnetic sensors; Magnetism; Magnetoelasticity; Magnetoelectric, magnetostrictive, magnetoacoustic, magnetooptic and magnetothermal devices. Spintronics; Magnetostriction; Magnetostrictive, magnetoacoustic, and magnetostatic devices; Mechanical sensors; Resonant frequencies; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Sensor arrays; Sensor phenomena and characterization; Sensors; Temperature sensors; Thick films; Temperature measurement; Microsensor; Measurement sensor; Frequency response; Magnetoelastic effects; Pressure measurement; Experimental study; Magnetic device; Remote sensing
• ISSN: 0018-9464; 1941-0069
• DOI: 10.1109/20.951041

Magnetoelastic thick film sensors mechanically deform when subjected to a magnetic field impulse, launching elastic waves within the sensor the magnitude of which is greatest at the mechanical resonant frequency. As the sensors are magnetostrictive, the mechanical deformations launch magnetic flux that can be detected remotely. The characteristic resonant frequency of a magnetoelastic sensor, which is a function of the length, density, elasticity and Poisson's ratio of the sensor material, changes in response to temperature, pressure, ambient flow rate and, in combination with a mass changing, chemically responsive layer different analyte concentrations. By using an array of such sensors different environmental parameters can be simultaneously determined in a complex environment; we have designed and fabricated such an array for the simultaneous measurement of temperature and pressure.