A Large Range Flexure-Based Servo System Supporting Precision Additive Manufacturing

• Published in: Engineering (Beijing, China) Vol. 3; no. 5; pp. 708 - 715
• Main Authors: Zhang, Zhen, Yan, Peng, Hao, Guangbo
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 01.10.2017; State Key Laboratory of Tribology & Institute of Manufacturing Engineering, Tsinghua University, Beijing 100084, China; Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China%Key Laboratory of High-Efficiency and Clean Mechanical Manufacturing, Ministry of Education, School of Mechanical Engineering, Shandong University,Jinan 250061, China%Department of Electrical and Electronic Engineering, University College Cork, Cork, Ireland; Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipment and Control, Tsinghua University, Beijing 100084, China; Elsevier
• Subjects: Beam flexure; Micro-stereolithography; Nanopositioning; Precision additive manufacturing; Micro-stereolithography; Precision additive manufacturing; Nanopositioning; Beam flexure
• ISSN: 2095-8099
• DOI: 10.1016/J.ENG.2017.05.020

This paper presents the design, development, and control of a large range beam flexure-based nano servo system for the micro-stereolithography （MSL） process. As a key enabler of high accuracy in this process, a compact desktop-size beam flexure-based nanopositioner was designed with millimeter range and nanometric motion quality. This beam flexure-based motion system is highly suitable for harsh operation conditions, as no assembly or maintenance is required during the operation. From a mechanism design viewpoint, a mirror-symmetric arrangement and appropriate redundant constraints are crucial to reduce undesired parasitic motion. Detailed finite element analysis （FEA） was conducted and showed satisfactory mechanical features. With the identified dynamic models of the nanopositioner, real-time control strategies were designed and implemented into the monolithically fabricated prototype system, demonstrating the enhanced tracking capability of the MSL process. The servo system has both a millimeter operating range and a root mean square （RMS） tracking error of about 80 nm for a circular traiectorv.