A new approach for determining accurate chemical distributions using in-situ GCIB cross-section imaging
Time‐of‐flight secondary ion mass spectrometry (TOF‐SIMS) has become widely used to characterize various kinds of materials, especially organic materials. It has recently become possible to investigate the molecular distributions underneath the surface using Ar‐GCIB (gas cluster ion beam) depth prof...
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Published in | Surface and interface analysis Vol. 46; no. S1; pp. 83 - 86 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
Bognor Regis
Blackwell Publishing Ltd
01.11.2014
Wiley Subscription Services, Inc |
Subjects | |
Online Access | Get full text |
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Summary: | Time‐of‐flight secondary ion mass spectrometry (TOF‐SIMS) has become widely used to characterize various kinds of materials, especially organic materials. It has recently become possible to investigate the molecular distributions underneath the surface using Ar‐GCIB (gas cluster ion beam) depth profiling. It is an important new capability for practical use of TOF‐SIMS because the subsurface and interface chemistry plays an important role in the performance of many products. However, it is difficult to obtain accurate chemical depth distributions using sputter depth profiling when the sample has a significant surface roughness and/or inhomogeneous structure. In order to resolve this problem, we proposed an approach to determine the accurate chemical distributions using GCIB cross‐section imaging method. In this study, this approach was demonstrated for practical organic samples, and accurate chemical depth distributions were determined. Copyright © 2014 John Wiley & Sons, Ltd. |
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Bibliography: | ark:/67375/WNG-NN7BK386-Q ArticleID:SIA5595 istex:3EC1079A3D727A03E8E29CAF080300F193C2DEBC ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
ISSN: | 0142-2421 1096-9918 |
DOI: | 10.1002/sia.5595 |