Controllable Fabrication of Sub-10 nm Graphene Nanopores via Helium Ion Microscopy and DNA Detection

• Published in: Biosensors (Basel) Vol. 14; no. 4; p. 158
• Main Authors: Yuan, Zhishan, Lin, Yanbang, Hu, Jieming, Wang, Chengyong
• Format: Journal Article
• Language: English
• Published: Switzerland MDPI AG 01.04.2024
• Subjects: Accuracy; Analysis; Biosensing Techniques; Controllability; Copper; Deoxyribonucleic acid; DNA; DNA detection; DNA sequencing; Electrolytes; Etching; Fabrication; Graphene; graphene nanopores; Graphite - chemistry; Helium; Helium ions; HIM; Ion beams; Membranes; Microelectromechanical systems; Microscopy; Nanopores; Nanotechnology; Nucleotide sequencing; Pore size; Production processes; Raman spectroscopy; Reproducibility; Silicon nitride; Silicon wafers; Solid state; Spatial discrimination; Spatial resolution; Spectrum Analysis, Raman; Structure; Two dimensional analysis; Two dimensional materials; China; graphene nanopores; DNA detection; HIM

Solid-state nanopores have become a prominent tool in the field of single-molecule detection. Conventional solid-state nanopores are thick, which affects the spatial resolution of the detection results. Graphene is the thinnest 2D material and has the highest spatial detection resolution. In this st...