Controllable Fabrication of Sub-10 nm Graphene Nanopores via Helium Ion Microscopy and DNA Detection

Solid-state nanopores have become a prominent tool in the field of single-molecule detection. Conventional solid-state nanopores are thick, which affects the spatial resolution of the detection results. Graphene is the thinnest 2D material and has the highest spatial detection resolution. In this st...

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Bibliographic Details
Published inBiosensors (Basel) Vol. 14; no. 4; p. 158
Main Authors Yuan, Zhishan, Lin, Yanbang, Hu, Jieming, Wang, Chengyong
Format Journal Article
LanguageEnglish
Published Switzerland MDPI AG 01.04.2024
Subjects
Accuracy
Analysis
Biosensing Techniques
Controllability
Copper
Deoxyribonucleic acid
DNA
DNA detection
DNA sequencing
Electrolytes
Etching
Fabrication
Graphene
graphene nanopores
Graphite - chemistry
Helium
Helium ions
HIM
Ion beams
Membranes
Microelectromechanical systems
Microscopy
Nanopores
Nanotechnology
Nucleotide sequencing
Pore size
Production processes
Raman spectroscopy
Reproducibility
Silicon nitride
Silicon wafers
Solid state
Spatial discrimination
Spatial resolution
Spectrum Analysis, Raman
Structure
Two dimensional analysis
Two dimensional materials
China
graphene nanopores
DNA detection
HIM
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Summary:Solid-state nanopores have become a prominent tool in the field of single-molecule detection. Conventional solid-state nanopores are thick, which affects the spatial resolution of the detection results. Graphene is the thinnest 2D material and has the highest spatial detection resolution. In this study, a graphene membrane chip was fabricated by combining a MEMS process with a 2D material wet transfer process. Raman spectroscopy was used to assess the quality of graphene after the transfer. The mechanism behind the influence of the processing dose and residence time of the helium ion beam on the processed pore size was investigated. Subsequently, graphene nanopores with diameters less than 10 nm were fabricated via helium ion microscopy. DNA was detected using a 5.8 nm graphene nanopore chip, and the appearance of double-peak signals on the surface of 20 mer DNA was successfully detected. These results serve as a valuable reference for nanopore fabrication using 2D material for DNA analysis.
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ISSN:2079-6374
2079-6374
DOI:10.3390/bios14040158