Composite Microhardness of Quartz - Al Structures

• Published in: Crystal research and technology (1979) Vol. 34; no. 3; pp. 391 - 395
• Main Authors: Trifonova, E. P., Lasarova, V., Spassov, L., Efremova, N.
• Format: Journal Article
• Language: English
• Published: Berlin WILEY-VCH Verlag 01.03.1999; WILEY‐VCH Verlag; Wiley-VCH
• Subjects: Al-films; Applied sciences; Condensed matter: structure, mechanical and thermal properties; Exact sciences and technology; Knoop; Mechanical and acoustical properties; Metals. Metallurgy; microhardness; Physical properties of thin films, nonelectronic; Physics; quartz-Al structures; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); thermal annealing; Vickers; Thin films; Heterojunctions; Mechanical properties; Aluminium; Experimental study; Quartz; Thermal annealing; Microhardness; Depth profiles; Substrates
• ISSN: 0232-1300; 1521-4079
• DOI: 10.1002/(SICI)1521-4079(199903)34:3<391::AID-CRAT391>3.0.CO;2-M

The microhardness‐depth profiles of as‐obtained and annealed quartz (INFstrate)‐Al (film) structures have been investigated. A layer of constant hardness has been detected beneath the initial interface. This is supposed to result from incorporation of aluminium atoms into the surface layer of the INFstrate, reduction of SiO2 and diffusion of the atoms of a certain element during the processes of preparing and rapid thermal annealing of the structures.