A new and simple concept of tunable two-chip microcavities for filter applications in WDM systems

A new and simple two-chip concept for microcavities with application in dense wavelength-division-multiplexed systems as tunable optical filters is presented. The Fabry-Perot cavity is created without any costly distance holder or sacrificial layer by simply utilizing the stress of the dielectric Br...

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Bibliographic Details
Published inIEEE photonics technology letters Vol. 12; no. 11; pp. 1522 - 1524
Main Authors Aziz, M., Pfeifer, J., Wohlfarth, M., Luber, C., Wu, S., Meissner, P.
Format Journal Article
LanguageEnglish
Published New York IEEE 01.11.2000
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
Biomembranes
Capacitance
Dielectric substrates
Dielectrics
Electrostatics
Fabry-Perot
Holes
Metallization
Microcavities
Optical filters
Semiconductors
Stress
Wavelength division multiplexing
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Summary:A new and simple two-chip concept for microcavities with application in dense wavelength-division-multiplexed systems as tunable optical filters is presented. The Fabry-Perot cavity is created without any costly distance holder or sacrificial layer by simply utilizing the stress of the dielectric Bragg-mirrors against the semiconductor substrate. Electrostatic tunability is achieved by making use of the high capacitance of the metallized cantilevers holding the actuable membrane.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:1041-1135
1941-0174
DOI:10.1109/68.887731