Tribology of MEMS

Because of large surface-to-volume ratios and low restoring forces, unwanted adhesion and friction can dominate the performance of microelectromechanical systems (MEMS) devices. To guarantee the function and reliability of MEMS devices, tribologists must understand the origins of adhesion, friction,...

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Bibliographic Details
Published inMRS bulletin Vol. 26; no. 4; pp. 302 - 304
Main Authors de Boer, M.P., Mayer, T.M.
Format Journal Article
LanguageEnglish
Published New York, USA Cambridge University Press 01.04.2001
Springer Nature B.V
Subjects
Technical Feature
Tribology
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Summary:Because of large surface-to-volume ratios and low restoring forces, unwanted adhesion and friction can dominate the performance of microelectromechanical systems (MEMS) devices. To guarantee the function and reliability of MEMS devices, tribologists must understand the origins of adhesion, friction, and wear over a broad range of length scales from the macroscopic to the molecular. In this article, we present an overview of challenges, successes, and initial steps toward a fundamental understanding.
Bibliography:PII:S0883769400023514
ArticleID:02351
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content type line 23
ISSN:0883-7694
1938-1425
DOI:10.1557/mrs2001.65