Piezoactuators and Piezomotors with Nano- and Micro-Dimensional Resolution for Test and Control Equipment

The state of development and production of test and control equipment with nano- and microsize resolution is investigated. The results of the development analysis are presented, the classification of piezoactuators and piezomotors of the leading manufacturers is compiled. The most characteristic str...

Full description

Saved in:
Bibliographic Details
Published inMeasurement techniques Vol. 60; no. 2; pp. 166 - 172
Main Authors Bardin, V. A., Vasil’ev, V. A., Chernov, P. S.
Format Journal Article
LanguageEnglish
Published New York Springer US 01.05.2017
Springer
Springer Nature B.V
Subjects
Actuators
Analytical Chemistry
Characterization and Evaluation of Materials
Control equipment
Measurement Science and Instrumentation
Measurement techniques
Microelectromechanical systems
Motors
Physical Chemistry
Physics
Physics and Astronomy
Piezoelectric motors
Piezoelectricity
Stepped
equipment
control
piezoactuator
classification
piezoelectric motor
Online AccessGet full text

Cover

More Information
Summary:The state of development and production of test and control equipment with nano- and microsize resolution is investigated. The results of the development analysis are presented, the classification of piezoactuators and piezomotors of the leading manufacturers is compiled. The most characteristic structures of piezoelectric motors are considered. It is shown that stepped piezoelectric motors satisfy the requirements imposed on the actuators of test and control equipment.
ISSN:0543-1972
1573-8906
DOI:10.1007/s11018-017-1168-5