Characterization of Anodic Aluminum Oxide Membrane with Variation of Crystallizing Temperature for pH Sensor
We fabricated electrolyte-dielectric-metal (EDM) device incorporating a high-k Al2O3 sensing membrane from a porous anodic aluminum oxide (AAO) using a two step anodizing process for pH sensors. In order to change the properties of the AAO template, the crystallizing temperature was varied from 400...
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Published in | Journal of nanoscience and nanotechnology Vol. 15; no. 11; p. 8642 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
United States
01.11.2015
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Online Access | Get more information |
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Summary: | We fabricated electrolyte-dielectric-metal (EDM) device incorporating a high-k Al2O3 sensing membrane from a porous anodic aluminum oxide (AAO) using a two step anodizing process for pH sensors. In order to change the properties of the AAO template, the crystallizing temperature was varied from 400 degrees C to 700 degrees C over 2 hours. The structural properties were observed by field emission scanning electron microscopy (FE-SEM). The pH sensitivity increased with an increase in the crystallizing temperature from 400 degrees C to 600 degrees C. However at 700 degrees C, deformation occurred. The porous AAO sensor with a crystallizing temperature of 600 degrees C displayed the good sensitivity and long-term stability and the values were 55.7 mV/pH and 0.16 mV/h, respectively. |
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ISSN: | 1533-4899 |
DOI: | 10.1166/jnn.2015.11506 |