High efficiency and broad bandwidth grating coupler between nanophotonic waveguide and fibre

• Published in: Chinese physics B Vol. 19; no. 1; pp. 393 - 397
• Main Author: 朱宇 徐学俊 李智勇 周亮 韩伟华 樊中朝 俞育德 余金中
• Format: Journal Article
• Language: English
• Published: IOP Publishing 2010
• Subjects: Alignment; Bandwidth; Computational efficiency; Computer simulation; Computing time; Diffraction gratings; Error analysis; Errors; Etching; Fibre; Gratings (spectra); Joining; Mathematical analysis; Nanocomposites; Nanomaterials; Nanostructure; Noise levels; Tolerances; Waveguides; Wavelengths; 光栅耦合器; 光纤耦合器; 波导光栅; 纳米制造; 绝缘体上硅; 耦合效率
• ISSN: 1674-1056; 2058-3834
• DOI: 10.1088/1674-1056/19/1/014219

A high efficiency and broad bandwidth grating coupler between a silicon-on-insulator （SOI） nanophotonic waveguide and fibre is designed and fabricated. Coupling efficiencies of 46% and 25% at a wavelength of 1.55um are achieved by simulation and experiment, respectively. An optical 3 dB bandwidth of 45 mn from 1530 nm to 1575 nm is also obtained in experin, ent. Numerical calculation shows that a tolerance to fabrication error of 10 nm in etch depth is achievable. The measurement results indicate that the alignment error of 112 um results in less than 1 dB additional coupling loss.