Development of swarm transport theory in radio-frequency electric and crossed electric and magnetic fields

• Published in: Applied surface science Vol. 192; no. 1; pp. 26 - 49
• Main Authors: White, R.D., Ness, K.F., Robson, R.E.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier B.V 30.05.2002; Elsevier Science
• Subjects: Boltzmann equation; Electric discharges; Electron swarms; Exact sciences and technology; High-frequency discharges; Ion swarms; Ionization of plasmas; Kinetic and transport theory of gases; Physics; Physics of gases; Physics of gases, plasmas and electric discharges; Physics of plasmas and electric discharges; Plasma discharge modelling; Plasma properties; Transport properties; Boltzmann equation; Electron swarms; 52.25.Fi; 52.25.Jm; 51.10+y; Plasma discharge modelling; Ion swarms; 52.80.Pi; Plasma simulation; Electric field effects; Electron transport theory; Magnetic field effects; Theoretical study; Radiofrequency
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/S0169-4332(02)00019-3

The advancements associated with modern day technology demands incorporation of the best physical understanding and the most accurate modelling of charged particle motion in gases. In recent times there have been major advances in the fundamental swarm transport theory, and this is the subject of the present paper. We start from 1986, when “multi-term” solutions of Boltzmann’s equation for static electric fields had been developed to a sophisticated level, and proceed through to the present day, where the theory is motivated far more by application to industrial processes, which involve both electric and magnetic fields , either static or time varying. We present a unified time-dependent multi-term solution of Boltzmann’s equation, emphasising the common methods and techniques underlying the treatment of all these situations, whether they be for electron or ion swarms. New and significant numerical results are presented to highlight the rich and diverse range of phenomena which are observed.