Refractive Index and Transmittance Optimization of C-S-Au Film by Plasma Process

Carbon-sulfur-gold (C-S-Au) film was formed by co-operation process of plasma CVD and sputtering with using methane, SF6 and Ar mixture gas and gold plate discharge electrode. After optimization, 51% of transmittance at around 500nm and 3.5 of refractive index was realized at a gas flow rate of 10,...

Full description

Saved in:
Bibliographic Details
Published inJournal of Photopolymer Science and Technology Vol. 15; no. 2; pp. 317 - 321
Main Authors Kashem, Md. Abul, Matushita, Masaki, Morita, Shinzo
Format Journal Article
LanguageEnglish
Published Hiratsuka The Society of Photopolymer Science and Technology(SPST) 01.01.2002
Japan Science and Technology Agency
Subjects
C-S-Au Film
Gold
Optical transmittance
Refractive Index
RF Plasma CVD
Sputtering
Online AccessGet full text

Cover

Abstract Carbon-sulfur-gold (C-S-Au) film was formed by co-operation process of plasma CVD and sputtering with using methane, SF6 and Ar mixture gas and gold plate discharge electrode. After optimization, 51% of transmittance at around 500nm and 3.5 of refractive index was realized at a gas flow rate of 10, 10 and 15 SCCM for methane, SF6 and Ar respectively, a pressure of 0.1Torr and a discharge power of 100W. The large refractive index was referred to atomically distributed gold atom in the C-S-Au film.
AbstractList Carbon-sulfur-gold (C-S-Au) film was formed by co-operation process of plasma CVD and sputtering with using methane, SF6 and Ar mixture gas and gold plate discharge electrode. After optimization, 51% of transmittance at around 500nm and 3.5 of refractive index was realized at a gas flow rate of 10, 10 and 15 SCCM for methane, SF6 and Ar respectively, a pressure of 0.1Torr and a discharge power of 100W. The large refractive index was referred to atomically distributed gold atom in the C-S-Au film.
Author Matushita, Masaki
Kashem, Md. Abul
Morita, Shinzo
Author_xml – sequence: 1
  fullname: Kashem, Md. Abul
  organization: Department of Electronics, Graduate School of Engineering, Nagoya University
– sequence: 2
  fullname: Matushita, Masaki
  organization: Department of Electronics, Graduate School of Engineering, Nagoya University
– sequence: 3
  fullname: Morita, Shinzo
  organization: Department of Electronics, Graduate School of Engineering, Nagoya University
BookMark eNpVkN9LwzAQx4NMcJv-Bb4EfO5smh9tHsdwOhhs6HwOZ5u4jjapSSbOv96OydCXOzi-nzvuM0ID66xG6Jakk4xJdt9tXXSdaw6t9hPCJ5TkF2hIKJOJoFQM0DCVhCUyY-wKjULYpSmlnMshWj9r46GM9afGC1vpLwy2whsPNrR1jGBLjVddrNv6G2LtLHYGz5KXZLrH87pp8dsBrxsILeC1d6UO4RpdGmiCvvntY_Q6f9jMnpLl6nExmy6TknEeEy6lEQWHwlCuQWeZpHlJSSUESTMBQkhDUpkWoJnMRWbA5BxExYwgVT8r6BjdnfZ23n3sdYhq5_be9icVYYyJ_tVc9Cl6SpXeheC1UZ2vW_AHRVJ1VKf-qlOEq15dTy1P1C5EeNdnBnysy0b_Y4gsiiOXnUqPn2PlFrzSlv4ASLiClw
CitedBy_id crossref_primary_10_2494_photopolymer_16_55
crossref_primary_10_2494_photopolymer_17_159
crossref_primary_10_1103_PhysRevB_69_193406
crossref_primary_10_2494_photopolymer_18_9
ContentType Journal Article
Copyright The Technical Association of Photopolymers, Japan
Copyright Japan Science and Technology Agency 2002
Copyright_xml – notice: The Technical Association of Photopolymers, Japan
– notice: Copyright Japan Science and Technology Agency 2002
DBID AAYXX
CITATION
7SP
7SR
7U5
8FD
JG9
L7M
DOI 10.2494/photopolymer.15.317
DatabaseName CrossRef
Electronics & Communications Abstracts
Engineered Materials Abstracts
Solid State and Superconductivity Abstracts
Technology Research Database
Materials Research Database
Advanced Technologies Database with Aerospace
DatabaseTitle CrossRef
Materials Research Database
Engineered Materials Abstracts
Solid State and Superconductivity Abstracts
Technology Research Database
Advanced Technologies Database with Aerospace
Electronics & Communications Abstracts
DatabaseTitleList
Materials Research Database
DeliveryMethod fulltext_linktorsrc
Discipline Chemistry
EISSN 1349-6336
EndPage 321
ExternalDocumentID 3107809711
10_2494_photopolymer_15_317
article_photopolymer1988_15_2_15_2_317_article_char_en
GroupedDBID 2WC
5GY
ACIWK
AENEX
ALMA_UNASSIGNED_HOLDINGS
CS3
DU5
HH5
JSF
JSH
KQ8
OK1
RJT
RNS
RZJ
TKC
ZE2
AAYXX
CITATION
7SP
7SR
7U5
8FD
JG9
L7M
ID FETCH-LOGICAL-c455t-599f685a8f35eae22937c31d661026a669f10908ae49762faf75a6d4f61dae483
ISSN 0914-9244
IngestDate Thu Oct 10 19:55:43 EDT 2024
Fri Aug 23 00:32:15 EDT 2024
Wed Apr 05 10:33:21 EDT 2023
IsDoiOpenAccess true
IsOpenAccess true
IsPeerReviewed false
IsScholarly true
Issue 2
Language English
LinkModel OpenURL
MergedId FETCHMERGED-LOGICAL-c455t-599f685a8f35eae22937c31d661026a669f10908ae49762faf75a6d4f61dae483
OpenAccessLink https://www.jstage.jst.go.jp/article/photopolymer1988/15/2/15_2_317/_article/-char/en
PQID 1444624476
PQPubID 1976367
PageCount 5
ParticipantIDs proquest_journals_1444624476
crossref_primary_10_2494_photopolymer_15_317
jstage_primary_article_photopolymer1988_15_2_15_2_317_article_char_en
PublicationCentury 2000
PublicationDate 2002-01-01
PublicationDateYYYYMMDD 2002-01-01
PublicationDate_xml – month: 01
  year: 2002
  text: 2002-01-01
  day: 01
PublicationDecade 2000
PublicationPlace Hiratsuka
PublicationPlace_xml – name: Hiratsuka
PublicationTitle Journal of Photopolymer Science and Technology
PublicationTitleAlternate J. Photopol. Sci. Technol.
PublicationYear 2002
Publisher The Society of Photopolymer Science and Technology(SPST)
Japan Science and Technology Agency
Publisher_xml – name: The Society of Photopolymer Science and Technology(SPST)
– name: Japan Science and Technology Agency
References 1). M.D.B. Charlton, M.E. Zoorob and G.J. Parker, Mat. Sci. Eng. B, 74 (2000) pp.17-21.
7). M. Matsushita, Md. Zarid Bin Harum, Kashem, Md. Abul and S. Morita; J. Photoplolym. Sci. and Tech, 12 (1) (1999) pp.11-14.
4). L. Marutinu, Solar Energy Materials, 15 (1987) p.21.
8). For example; K. Ishikawa, T. Isonaga, S. Wakita, Y. Suzuki; Solid State Ionics, 79 (1995) pp.60-66
5). R. d'Agostino, Ed., "Plasma Deposition, Treatment, and Etching of Polymers", Academic Press, (1990).
3). H. Kosaka, T. Kawashima, A Tomita et. al., Phy. Rev. B 58 (16) (1998) pp.10096-10099.
6). M. Matsushita, Kashem, Md. Abul and S. Morita; J. Photoplolym. Sci. and Tech, 14 (1) (2001) pp.123-126.
2). D. Cassagne, C. Jouanin, and D. Bertho, Phy. Rev. B 53 (11) (1996) p.7134.
9). M. Matsushita, Kashem, Md. Abul and S. Morita; Printing in the Thin Solid films.
References_xml
SSID ssj0033559
Score 1.6071165
Snippet Carbon-sulfur-gold (C-S-Au) film was formed by co-operation process of plasma CVD and sputtering with using methane, SF6 and Ar mixture gas and gold plate...
SourceID proquest
crossref
jstage
SourceType Aggregation Database
Publisher
StartPage 317
SubjectTerms C-S-Au Film
Gold
Optical transmittance
Refractive Index
RF Plasma CVD
Sputtering
Title Refractive Index and Transmittance Optimization of C-S-Au Film by Plasma Process
URI https://www.jstage.jst.go.jp/article/photopolymer1988/15/2/15_2_317/_article/-char/en
https://www.proquest.com/docview/1444624476
Volume 15
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
ispartofPNX Journal of Photopolymer Science and Technology, 2002, Vol.15(2), pp.317-321
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwrV1db9MwFLXKQIIXxKfoGMgPvA2XJrGd-LGaNk1Mg0I7aW-Rndi0iDSoTSe2v8kf4jp2snQb0ph4SSs3bVyfk-tzb-61EXoX82Eca3t_wwuhyoREqDwiGc8yBnOSkHUy5vEnfnhCP56y017vdydraV2pQXZxY13JXVCFNsDVVsn-A7Ltj0IDvAd84QgIw_FWGH_Vpi5yOrMJkLn-VT8JqGefYl5VdTHAZzAJha-1rFMvyISM1rsH8x-FVZ5jEM-FbMoF_qJUx7OysnspnBd62RqD-lLX4vJHcjXTLsqaD3ZHqpN2KKv1ajZ3YvVYrkC5th-VS98-mc0XF-VGJCK8EomwvG5STW_XN9DQk_Fk2sQ8fFwyoAScQhdl0M4qR1QQHrmVUlqzzTr0DDs2OHLFoH46j1wB9tWZArxOarc37nRyELBB-92NJbg9wGn37EAkSRqwNHQH-GLanGbr5YCe99D9EKyfNbtHX9pHWxEIPLcApP-fbiks258PN_RmQy49-A4ew7frsqHWQtMn6LGnBh65njxFPb14hh7uNXsHPkfjS2bimpkYIMEbzMRdZuLSYMdMbJmJ1Tl2zMSemS_QycH-dO-Q-L07SEYZqwgTwvCEycRETEsdgqqMsyjIQQ6C1y85F8amBCdSUxDEoZEmZpLn1PAgh7Ykeom2FuVCv0JY6TiX1D4yBu9ZmUAJQVUOrkPIo6HIh330vhmi9KdboiUF19aO6AZiFigY0T7ad8PYnnw3ePtop0Eh9TZhBY40pRxAjfn2f7rMa_To8l7bQVvVcq3fgA6u1NuaV38AIu6-lw
link.rule.ids 315,783,787,27936,27937
linkProvider Colorado Alliance of Research Libraries
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Refractive+Index+and+Transmittance+Optimization+of+C-S-Au+Film+by+Plasma+Process&rft.jtitle=Journal+of+Photopolymer+Science+and+Technology&rft.au=Kashem%2C+Md.+Abul&rft.au=Matushita%2C+Masaki&rft.au=Morita%2C+Shinzo&rft.date=2002-01-01&rft.pub=The+Society+of+Photopolymer+Science+and+Technology%28SPST%29&rft.issn=0914-9244&rft.eissn=1349-6336&rft.volume=15&rft.issue=2&rft.spage=317&rft.epage=321&rft_id=info:doi/10.2494%2Fphotopolymer.15.317&rft.externalDocID=article_photopolymer1988_15_2_15_2_317_article_char_en
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0914-9244&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0914-9244&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0914-9244&client=summon