Refractive Index and Transmittance Optimization of C-S-Au Film by Plasma Process

Carbon-sulfur-gold (C-S-Au) film was formed by co-operation process of plasma CVD and sputtering with using methane, SF6 and Ar mixture gas and gold plate discharge electrode. After optimization, 51% of transmittance at around 500nm and 3.5 of refractive index was realized at a gas flow rate of 10,...

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Bibliographic Details
Published inJournal of Photopolymer Science and Technology Vol. 15; no. 2; pp. 317 - 321
Main Authors Kashem, Md. Abul, Matushita, Masaki, Morita, Shinzo
Format Journal Article
LanguageEnglish
Published Hiratsuka The Society of Photopolymer Science and Technology(SPST) 01.01.2002
Japan Science and Technology Agency
Subjects
C-S-Au Film
Gold
Optical transmittance
Refractive Index
RF Plasma CVD
Sputtering
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Summary:Carbon-sulfur-gold (C-S-Au) film was formed by co-operation process of plasma CVD and sputtering with using methane, SF6 and Ar mixture gas and gold plate discharge electrode. After optimization, 51% of transmittance at around 500nm and 3.5 of refractive index was realized at a gas flow rate of 10, 10 and 15 SCCM for methane, SF6 and Ar respectively, a pressure of 0.1Torr and a discharge power of 100W. The large refractive index was referred to atomically distributed gold atom in the C-S-Au film.
ISSN:0914-9244
1349-6336
DOI:10.2494/photopolymer.15.317