An artificial nose based on a micromechanical cantilever array
A novel chemical sensor based on a micromechanical array of silicon cantilevers is presented. Chemical reactions are transduced by sensitization of cantilevers with coatings such as metals, self-assembled monolayers, or polymers into a mechanical response. This is read out using an optical beam-defl...
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| Published in | Analytica chimica acta Vol. 393; no. 1; pp. 59 - 65 |
|---|---|
| Main Authors | , , , , , , , , , |
| Format | Journal Article Conference Proceeding |
| Language | English |
| Published |
Amsterdam
Elsevier B.V
30.06.1999
Elsevier |
| Subjects | |
| Online Access | Get full text |
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| Abstract | A novel chemical sensor based on a micromechanical array of silicon cantilevers is presented. Chemical reactions are transduced by sensitization of cantilevers with coatings such as metals, self-assembled monolayers, or polymers into a mechanical response. This is read out using an optical beam-deflection technique by a sequential readout scheme. Reference cantilever sensors permit subtraction of background signals (differential measurement). Coating of each cantilever sensor with a different sensitive layer allows operation of the array-device as a new form of chemical nose. Detection of hydrogen, primary alcohols, natural flavors, and water vapor is demonstrated. We show that the magnitude of sensor response is proportional to the amount of analyte present. |
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| AbstractList | A novel chemical sensor based on a micromechanical array of silicon cantilevers is presented. Chemical reactions are transduced by sensitization of cantilevers with coatings such as metals, self-assembled monolayers, or polymers into a mechanical response. This is read out using an optical beam-deflection technique by a sequential readout scheme. Reference cantilever sensors permit subtraction of background signals (differential measurement). Coating of each cantilever sensor with a different sensitive layer allows operation of the array-device as a new form of chemical nose. Detection of hydrogen, primary alcohols, natural flavors, and water vapor is demonstrated. We show that the magnitude of sensor response is proportional to the amount of analyte present. |
| Author | Berger, R Lang, H.P Gimzewski, J.K Fornaro, P Güntherodt, H.J Battiston, F.M Baller, M.K Meyer, E Gerber, Ch Ramseyer, J.P |
| Author_xml | – sequence: 1 givenname: H.P surname: Lang fullname: Lang, H.P organization: IBM Research Division, Zurich Research Laboratory, 8803 Rüschlikon, Switzerland – sequence: 2 givenname: M.K surname: Baller fullname: Baller, M.K organization: IBM Research Division, Zurich Research Laboratory, 8803 Rüschlikon, Switzerland – sequence: 3 givenname: R surname: Berger fullname: Berger, R organization: IBM Research Division, Zurich Research Laboratory, 8803 Rüschlikon, Switzerland – sequence: 4 givenname: Ch surname: Gerber fullname: Gerber, Ch organization: IBM Research Division, Zurich Research Laboratory, 8803 Rüschlikon, Switzerland – sequence: 5 givenname: J.K surname: Gimzewski fullname: Gimzewski, J.K organization: IBM Research Division, Zurich Research Laboratory, 8803 Rüschlikon, Switzerland – sequence: 6 givenname: F.M surname: Battiston fullname: Battiston, F.M organization: Institute of Physics, University of Basel, Klingelbergstrasse 82, CH–4056 Basel, Switzerland – sequence: 7 givenname: P surname: Fornaro fullname: Fornaro, P organization: Institute of Physics, University of Basel, Klingelbergstrasse 82, CH–4056 Basel, Switzerland – sequence: 8 givenname: J.P surname: Ramseyer fullname: Ramseyer, J.P organization: Institute of Physics, University of Basel, Klingelbergstrasse 82, CH–4056 Basel, Switzerland – sequence: 9 givenname: E surname: Meyer fullname: Meyer, E organization: Institute of Physics, University of Basel, Klingelbergstrasse 82, CH–4056 Basel, Switzerland – sequence: 10 givenname: H.J surname: Güntherodt fullname: Güntherodt, H.J organization: Institute of Physics, University of Basel, Klingelbergstrasse 82, CH–4056 Basel, Switzerland |
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| Keywords | Micromechanics Chemical sensors Artificial nose Nanoscale science Nanotechnology Olefaction Micromechanical devices Performance evaluation Electronic nose Volatile organic compound Microminiaturization Chemical sensor Sensor array Gas detector |
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| Snippet | A novel chemical sensor based on a micromechanical array of silicon cantilevers is presented. Chemical reactions are transduced by sensitization of cantilevers... |
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| SubjectTerms | Analytical chemistry Artificial nose Chemical sensors Chemistry Exact sciences and technology General, instrumentation Micromechanics Nanoscale science Nanotechnology Olefaction |
| Title | An artificial nose based on a micromechanical cantilever array |
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