An artificial nose based on a micromechanical cantilever array

• Published in: Analytica chimica acta Vol. 393; no. 1; pp. 59 - 65
• Main Authors: Lang, H.P, Baller, M.K, Berger, R, Gerber, Ch, Gimzewski, J.K, Battiston, F.M, Fornaro, P, Ramseyer, J.P, Meyer, E, Güntherodt, H.J
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier B.V 30.06.1999; Elsevier
• Subjects: Analytical chemistry; Artificial nose; Chemical sensors; Chemistry; Exact sciences and technology; General, instrumentation; Micromechanics; Nanoscale science; Nanotechnology; Olefaction; Micromechanics; Chemical sensors; Artificial nose; Nanoscale science; Nanotechnology; Olefaction; Micromechanical devices; Performance evaluation; Electronic nose; Volatile organic compound; Microminiaturization; Chemical sensor; Sensor array; Gas detector
• ISSN: 0003-2670; 1873-4324
• DOI: 10.1016/S0003-2670(99)00283-4

A novel chemical sensor based on a micromechanical array of silicon cantilevers is presented. Chemical reactions are transduced by sensitization of cantilevers with coatings such as metals, self-assembled monolayers, or polymers into a mechanical response. This is read out using an optical beam-deflection technique by a sequential readout scheme. Reference cantilever sensors permit subtraction of background signals (differential measurement). Coating of each cantilever sensor with a different sensitive layer allows operation of the array-device as a new form of chemical nose. Detection of hydrogen, primary alcohols, natural flavors, and water vapor is demonstrated. We show that the magnitude of sensor response is proportional to the amount of analyte present.