Terahertz Real-Time Imaging Uncooled Arrays Based on Antenna-Coupled Bolometers or FET Developed at CEA-Leti

• Published in: Journal of infrared, millimeter and terahertz waves Vol. 36; no. 10; pp. 961 - 985
• Main Authors: Simoens, François, Meilhan, Jérôme, Nicolas, Jean-Alain
• Format: Journal Article
• Language: English
• Published: New York Springer US 01.10.2015; Springer Nature B.V
• Subjects: Antenna arrays; Bolometers; Cameras; Classical Electrodynamics; CMOS; Destructive testing; Electrical Engineering; Electronics and Microelectronics; Engineering; Field effect transistors; Field of view; Focal plane devices; Instrumentation; Metal oxide semiconductors; Nondestructive testing; Quality control; Real time; Security; Semiconductor devices; Antenna-coupled bolometer terahertz array; Terahertz real-time imaging; Terahertz uncooled 2D camera; Antenna-coupled field effect transistor terahertz array
• ISSN: 1866-6892; 1866-6906
• DOI: 10.1007/s10762-015-0197-x

Sensitive and large-format terahertz focal plane arrays (FPAs) integrated in compact and hand-held cameras that deliver real-time terahertz (THz) imaging are required for many application fields, such as non-destructive testing (NDT), security, quality control of food, and agricultural products industry. Two technologies of uncooled THz arrays that are being studied at CEA-Leti, i.e., bolometer and complementary metal oxide semiconductor (CMOS) field effect transistors (FET), are able to meet these requirements. This paper reminds the followed technological approaches and focuses on the latest modeling and performance analysis. The capabilities of application of these arrays to NDT and security are then demonstrated with experimental tests. In particular, high technological maturity of the THz bolometer camera is illustrated with fast scanning of large field of view of opaque scenes achieved in a complete body scanner prototype.