Micromachined Angular Rate Sensors for Automotive Applications

• Published in: IEEE sensors journal Vol. 7; no. 2; pp. 302 - 309
• Main Authors: Neul, R., Gomez, U.-M., Kehr, K., Bauer, W., Classen, J., Doring, C., Esch, E., Gotz, S., Hauer, J., Kuhlmann, B., Lang, C., Veith, M., Willig, R.
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.02.2007; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Angular rate sensor; Automotive applications; Automotive components; Automotive engineering; Control systems; Dynamical systems; Dynamics; Electronics; gyroscope; microelectromechanical systems (MEMS); Micromachining; Micromechanics; Navigation; Perturbation; Sensor systems and applications; Sensors; Signal to noise ratio; Stability; Vehicle detection; Vehicle dynamics; vehicle dynamics control; Vehicles
• ISSN: 1530-437X; 1558-1748
• DOI: 10.1109/JSEN.2006.888610

Micromachined angular rate sensors are key elements in several automotive systems, thus enabling highly sophisticated applications like rollover detection and mitigation, navigation systems, electronic stability program, and other future vehicle stabilizing and dynamics control systems. New automotive systems are demanding higher accuracy, better signal-to-noise ratio, higher robustness and insensitivity against external perturbations, better system availability and reliability, as well as easy application of the gyros. This paper is presenting the recent development, now the third generation, of micromachined angular rate sensors at Robert Bosch GmbH. Mass production was started in spring 2005. These surface micromachined gyroscopes exhibit outstanding performance compared to similar designs, especially in term of resolution, noise, and insensitivity against external perturbations